Vertical Pneumatic Vibration Isolator With Nested Solenoid Actuator
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Solution Overview
Problem
Existing vibration isolation systems face challenges in generating high compensation forces in compact spaces, particularly when dealing with high moving masses and high accelerations, as they often require large forces and cannot accommodate combined vertical and horizontal movement effectively.
Innovation Solution
A vibration isolator system incorporating a pneumatic spring effective only in the vertical direction, combined with a solenoid actuator and a flexible rod or buckling pendulum for horizontal isolation, allowing for active control and large force generation within a compact space by using a stiff connection in the horizontal direction and superposed magnetic actuators.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a pneumatic spring is used for vertical vibration isolation, then vibration isolation is achieved above the natural frequency, but large vibration amplitude increases around the natural frequency depending on damping
Solution Approach 1:
The patent implements active control using sensors to detect vibration and actuators to generate compensating forces, creating a feedback loop that actively counteracts vibrations around the natural frequency where passive pneumatic springs exhibit large amplitude increases
2Reliability
If non-contact actuators based on Lorentz principle are used for active control, then compensating forces are exerted on the system, but the system requires significant space for the moving coil and permanent magnet components
Solution Approach 1:
The patent nests the solenoid actuator within the pneumatic spring structure, placing the actuator's moving coil and magnet assembly inside the pneumatic spring's inner and outer housings, thereby utilizing the existing vertical space without increasing horizontal footprint
Solution Approach 2:
The patent transitions from horizontal arrangement of actuator components to vertical arrangement, with the solenoid actuator positioned vertically within the pneumatic spring, allowing the magnetic field to act vertically while maintaining a compact horizontal installation space
3Ease of operation
If solenoid actuators and level control are used for height control in case of large load changes, then height adjustment is achieved, but the system reaches limits and cannot handle large load changes effectively
Solution Approach 1:
The patent employs a compliant mechanical connection between the pneumatic spring and the supported load that allows horizontal movement, enabling the system to dynamically adapt to large load changes without requiring complex active height control mechanisms
4Stability of the object's composition
If a purely mechanical spring is used for vertical isolation, then height adjustment is possible without horizontal load shift, but the response behavior is so different from pneumatic spring that it is not suitable for many applications
Solution Approach 1:
The patent merges the advantages of mechanical springs (horizontal position stability through stiff horizontal connection) with pneumatic springs (superior vertical vibration isolation characteristics) by combining them in a single isolator unit with compliant horizontal coupling
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the production of large forces in a compact space, achieving effective vibration isolation with short settling times and adjustable natural frequency, suitable for high moving mass applications in the semiconductor industry.
Implementation Method 1
vibration isolation from the ground is achieved already above the natural frequency of the mass-spring system
Implementation Method 2
Pneumatic springs are usually adapted depending on the mass of the load to be supported
Implementation Method 3
The non-contact actuators which are otherwise used to control the system are mostly based on the Lorentz principle and consist of a moving coil and a permanent magnet
Implementation Method 4
The further component for horizontal isolation may in particular be a flexible rod or a buckling pendulum
Implementation Method 5
The further component for horizontal isolation may in particular be a flexible rod or a buckling pendulum
Data Source
AI summary
A vibration isolator with a pneumatic spring that is effective only in vertical direction, the pneumatic spring including a working space in which a vertically effective actuator is disposed.