Vertical Probe Arrays With Sliding Contacts for Mechanical Compliance

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Solution Overview

Problem

Conventional probe arrays face conflicts between high current carrying capacity, high electrical frequency performance, and mechanical compliance due to the inherent design constraints of probe length and material properties, leading to undesirably high contact force and low mechanical compliance.

Innovation Solution

The probes are designed as a two-part structure with each part sliding relative to the other, utilizing an elastic matrix to provide mechanical compliance and restoring force, decoupling electrical and mechanical design constraints.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the probe is made thick to increase current carrying capacity, then the current carrying capacity is improved, but the contact force becomes excessively high and mechanical compliance decreases

Engineering Contradiction:
Improvecurrent carrying capacityVSAvoidcontact force
Core Design Contradiction:
Quantity of substanceVSForce

Solution Approach 1:

The probe is divided into two separate parts: a rigid probe body for electrical conduction and a separate elastic mechanism (spring or elastomer) for mechanical compliance. This segmentation allows each component to be optimized independently - the probe body can be thick for high current capacity without necessarily increasing contact force, while the elastic mechanism handles the compliance function

Inventive Principle:
Principle #1Segmentation

2Speed

If the probe is made short to improve high frequency performance, then the electrical bandwidth is improved, but the mechanical compliance and contact force control become problematic

Engineering Contradiction:
Improveelectrical bandwidthVSAvoidmechanical compliance
Core Design Contradiction:
SpeedVSEase of operation

Solution Approach 1:

By separating the electrical conduction function (short probe body for high frequency) from the mechanical compliance function (dedicated spring or elastomer mechanism), the probe can be made short for improved electrical bandwidth while the separate elastic mechanism provides the necessary mechanical compliance and contact force control

Inventive Principle:
Principle #1Segmentation

3Ease of operation

If the probe is made elastic to provide mechanical compliance, then the mechanical compliance is improved, but the current carrying capacity decreases

Engineering Contradiction:
Improvemechanical complianceVSAvoidcurrent carrying capacity
Core Design Contradiction:
Ease of operationVSQuantity of substance

Solution Approach 1:

The probe structure is segmented into a rigid conductor portion for current carrying and a separate elastic mechanism for compliance. This allows the conductor to be optimized for electrical performance while the elastic mechanism handles mechanical compliance, eliminating the trade-off between these two properties

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The probe assembly combines different materials with complementary properties: conductive materials (metal) for the probe body to ensure high current carrying capacity, and elastic materials (spring steel or elastomers) for the mechanical compliance mechanism, creating a composite structure that achieves both electrical and mechanical performance requirements

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design allows for thick probes with high current carrying capacity and short probes for high frequency performance, achieving mechanical compliance and suitable contact force, with electrical bandwidth exceeding 100 GHz and mechanical compliance of 100 μm, while conventional probes cannot achieve both simultaneously.

Implementation Method 1

The probes engage with the elastic matrix such that a restoring force in response to vertical probe compression is provided by the elastic matrix

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentUS12442834B2Vertical probe array having sliding contacts in elastic guide plate
Publication Date: 2025.10.14 FORMFACTOR INC
  • US12442834B2 patent drawing
  • US12442834B2 patent drawing
  • US12442834B2 patent drawing

AI summary

A probe array having decoupled electrical and mechanical design constraints on the probes is provided. Each probe is a two-part structure with the two parts able to stay in electrical contact with each other as the parts slide up and down with respect to each other. The probes are disposed in through holes of an elastic matrix, each probe having its corresponding hole. The probes engage with the elastic matrix such that a restoring force in response to vertical probe compression is provided by the elastic matrix. With this approach, electrical and mechanical design are much more decoupled than in conventional spring probe design. The elastic matrix provides the mechanical compliance and restoring force, while the parts of the probe determine its current carrying capacity and electrical bandwidth.