Vertical Probe Head Structure for Tiny Contact Probing

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Solution Overview

Problem

Probe cards face challenges in achieving sufficient current withstanding capability and structural strength while maintaining a small diameter, leading to short lifespan and frequent replacement due to high resistance and vulnerability to wear or breakage during probing.

Innovation Solution

A probe head design with a vertical probe structure that includes a probe seat and multiple vertical probes, where the probe tip section narrows gradually to a smaller width and extends for a longer length, maintaining structural strength and allowing for wear without positional deviation, ensuring stable contact with tiny electrically conductive contacts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of moving object

If the diameter of the probe is reduced to meet tiny contact probing requirements, then the probe can access smaller contacts, but the resistance increases and current withstanding capability decreases

Engineering Contradiction:
Improveprobe diameterVSAvoidcurrent withstanding capability
Core Design Contradiction:
Area of moving objectVSReliability

Solution Approach 1:

The probe is designed with non-uniform cross-section: the upper portion (contact area) has small diameter to probe tiny contacts, while the lower portion (installation area) maintains large diameter for sufficient current capacity. This local differentiation allows each section to optimize for its specific function.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The probe is segmented into distinct functional zones: a probe tip section with gradually narrowing part and contact part for small diameter, and a body portion with larger diameter for current conduction. The segmentation separates the conflicting requirements of small size and high current capacity to different spatial regions.

Inventive Principle:
Principle #1Segmentation

2Area of moving object

If the probe diameter is reduced, then the probe can probe tiny contacts, but the structural strength is reduced making the probe vulnerable to wear and breakage

Engineering Contradiction:
Improveprobe diameterVSAvoidstructural strength
Core Design Contradiction:
Area of moving objectVSStrength

Solution Approach 1:

The probe structure implements local quality by providing small diameter only where needed for probing contacts, while maintaining large diameter in the body portion for structural strength. The gradual narrowing transition ensures stress distribution without sudden geometric discontinuities.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The probe is divided into a weak probe tip section (small diameter) and a strong body portion (large diameter), with the segmentation point located away from the contact area. This allows the critical contact region to be small while the load-bearing region remains strong.

Inventive Principle:
Principle #1Segmentation

3Area of moving object

If the probe tip section narrows suddenly to small width, then the probe can contact tiny contacts, but the rigidity is highly lowered causing positional deviation

Engineering Contradiction:
Improveprobe tip widthVSAvoidrigidity
Core Design Contradiction:
Area of moving objectVSStability of the object's composition

Solution Approach 1:

The probe tip section features a gradually narrowing part with curved, continuous transition rather than sudden angular changes. This smooth curvature distribution reduces stress concentration and maintains rigidity while achieving the small contact width.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The cross-sectional width parameter changes gradually along the length of the probe tip section, transitioning from large diameter at the base to small diameter at the contact point. This continuous parameter change avoids abrupt geometric transitions that would compromise rigidity.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS20240175900A1Probe head and method of producing tested semiconductor die and vertical probe manufacturing method
Publication Date: 2024.05.30 MPI CORP
  • US20240175900A1 patent drawing
  • US20240175900A1 patent drawing
  • US20240175900A1 patent drawing

AI summary

A probe head includes a probe seat, and vertical probes each having a head portion including a head portion installation section with a first width, and a probe tip section including a probe tip contact part with a second width smaller than the first width and a probe tip gradually narrowing part which is located between the head portion installation section and the probe tip contact part, gradually narrows from the first width to the second width, and has a first length smaller than a second length of the probe tip contact part. The head portion installation section protrudes out of a lower surface of the probe seat for a length smaller than the sum of the first and second lengths. The vertical probe is great in current withstanding capability, structural strength and life time, and meets the requirement of probing tiny electrically conductive contacts.