Vertical Reactive By-Product Collection Pipe Design
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Solution Overview
Problem
The two-story semiconductor manufacturing facility faces challenges in accommodating increased process gas usage due to its narrow physical structure, leading to insufficient reactive by-product collection treatment capacity and issues with pipe turbulence, clogging, and backflow of reactive by-products.
Innovation Solution
A reactive by-products collection system is designed to address the capacity issues by utilizing a collection device with increased capacity, connected vertically to a vacuum pump via a connection pipe, eliminating the need for a bent pipe structure and enhancing the system's ability to handle increased process gas usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If a two-story semiconductor manufacturing facility structure is used, then the physical space utilization is efficient, but the reactive by-product collection treatment capacity becomes insufficient when process gas usage increases
Solution Approach 1:
The collection device is designed to be replaceable rather than fixed, allowing the system to adapt dynamically to changing process gas usage requirements. The loading unit with transfer means enables easy replacement of collection devices with different capacities, transforming a static space-constrained system into a dynamic one that can scale with production needs.
Solution Approach 2:
The collection device is segmented into a replaceable module that can be independently exchanged. This segmentation allows the system to maintain the compact two-story structure while accommodating varying collection capacities by simply replacing the modular collection device rather than redesigning the entire system.
2Area of stationary object
If a bent pipe structure is used to connect the collection device to the vacuum pump, then the system can accommodate space constraints, but reactive by-products are generated in the pipe bending points and pipe clogging occurs
Solution Approach 1:
The connection pipe is designed to extend vertically in the upward direction rather than bending horizontally. This dimensional change in the pipe layout eliminates bending points while still accommodating the vertical space constraints of the two-story facility, preventing reactive by-product generation and clogging associated with bent pipes.
3Productivity
If the collection device capacity is increased to handle more process gas, then the reactive by-product collection treatment capacity improves, but the device becomes difficult to replace and install in narrow spaces
Solution Approach 1:
The loading unit incorporates transfer means such as casters or rollers that enable dynamic movement and easy replacement of the collection device. This dynamic replacement mechanism allows large-capacity collection devices to be installed and replaced without fixed mounting constraints, solving the contradiction between increased capacity and ease of replacement.
Solution Approach 2:
The loading unit acts as an intermediary platform between the collection device and the floor. It provides a standardized interface with transfer means, facilitating easy installation and replacement of collection devices with different capacities while maintaining compatibility with the narrow space constraints of the two-story facility.
4Productivity
If process gas usage is increased to meet manufacturing demands, then the productivity improves, but the existing collection device becomes insufficient and causes vacuum efficiency drops
Solution Approach 1:
The system allows changing the capacity parameter of the collection device by replacing it with a different model. When process gas usage increases and the existing collection device becomes insufficient, a larger-capacity collection device can be installed to restore and maintain vacuum efficiency, thereby supporting continued productivity improvement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively prevents the generation of reactive by-products in the pipe bending points, reduces the risk of pipe clogging and vacuum efficiency drops, and prevents reactive by-products from flowing back into the collection device, ensuring smooth semiconductor manufacturing operations.
Implementation Method 1
a connection pipe vertically connecting the vacuum pump and the collection device
Data Source
AI summary
Provided is a reactive by-products collection system utilizing the narrow sub-factory structure of the existing semiconductor manufacturing facility consisting of a two-story structure of the main factory and sub-factory and providing a replaceable collection device structure that is connected vertically to a vacuum pump via a connecting pipe so that it solves the problem of lack of reactive by-product collection treatment capacity in the system using increased process gas.