Vertical Resistive Memory Device with Charge Trap Layer

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Solution Overview

Problem

Resistive memory devices face challenges in improving the reliability of program operations due to limitations in maintaining data integrity and resistance state transitions.

Innovation Solution

The resistive memory device incorporates a vertical structure with conductive layers, interlayer insulating layers, a gate insulating layer, a charge trap layer, a channel layer, and a variable resistance layer, where electrons are trapped in the charge trap layer and voltages are applied to manage the resistance state, eliminating the need for negative voltages and enhancing data storage reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional resistive memory structure with top electrode and bottom electrode is used, then data storage is achieved through resistance change, but the reliability of program operation is insufficient

Engineering Contradiction:
Improveprogram operation reliabilityVSAvoiddata integrity maintenance
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The memory device is segmented into multiple functional layers including gate insulating layer, charge trap layer, channel layer, and variable resistance layer, each performing specific functions to improve program operation reliability while maintaining manufacturing feasibility

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from a planar two-electrode structure to a vertical multi-layer structure with a hole penetrating through conductive layers, enabling improved program operation reliability through three-dimensional charge trapping and resistance modulation mechanisms

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of operation

If negative voltages are used for resistance state transitions, then programming capability is achieved, but voltage generation complexity increases

Engineering Contradiction:
Improvevoltage generation simplicityVSAvoidvoltage generation system
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

A charge trap layer is introduced as an intermediary between the control gate and the variable resistance layer, enabling resistance state transitions through charge trapping and detrapping mechanisms that eliminate the need for negative voltage generation

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention changes the operating parameter from negative voltage application to positive voltage-controlled charge trapping, simplifying the voltage generation system while maintaining full programming capability through controlled electron injection into the charge trap layer

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves the reliability of program operations by maintaining data integrity and efficiently transitioning between high and low resistance states, reducing the complexity of voltage generation and enhancing overall performance.

Implementation Method 1

trapping electrons in the charge trap layer of the selected memory cell connected to a selected word line

Methodology Applied
Scientific EffectElectron trapping: Electrostatics

Data Source

PatentUS11948633B2Resistive memory device and operating method of the resistive memory device
Publication Date: 2024.04.02 SK HYNIX INC
  • US11948633B2 patent drawing
  • US11948633B2 patent drawing
  • US11948633B2 patent drawing

AI summary

A resistive memory device includes: conductive layers and interlayer insulating layers, which are alternatively stacked; a vertical hole vertically penetrating the conductive layers and the interlayer insulating layers; a gate insulating layer disposed over an inner wall of the vertical hole; a charge trap layer disposed over an inner wall of the gate insulating layer; a channel layer disposed over an inner wall of the charge trap layer; and a variable resistance layer disposed over an inner wall of the channel layer.