Vertical Sensor with Porous Electrode for Stable Gas Detection
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Solution Overview
Problem
Current sensors for detecting biological molecules lack high sensitivity, instant measurement capabilities, and reproducibility, with horizontal type sensors experiencing stability issues due to variations in pillar distribution and complex fabrication processes.
Innovation Solution
A vertical type sensor design featuring a substrate with a first electrode layer, a sensing layer reactive to target substances, and a second electrode layer with openings, allowing target substances to contact the sensing layer, which can include multiple sublayers and inert semiconductor layers, enabling efficient detection with a simple nanoparticle-based fabrication process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If horizontal type sensor with vapor deposition zinc oxide pillar is used, then gas concentration detection is achieved, but stability deteriorates due to significant variation of pillar distribution
Solution Approach 1:
The patent transitions from horizontal type sensor structure to vertical type sensor structure. The vertical configuration with stacked layers (substrate, first electrode layer, sensing layer, second electrode layer) eliminates the pillar distribution variation issues inherent in horizontal structures, providing stable and reproducible detection performance while maintaining gas concentration detection capability.
Solution Approach 2:
The sensing layer is designed with porous structure having controlled pore size and distribution. This porous configuration increases the surface area for gas interaction while ensuring uniform target substance distribution throughout the sensing layer, thereby improving both measurement precision and stability compared to non-porous or irregularly porous structures.
2Ease of manufacture
If photolithography is used for metal electrodes fabrication, then electrode identification is achieved, but fabrication complexity increases
Solution Approach 1:
The patent extracts and eliminates the photolithography step from the fabrication process. Instead of using photolithography for metal electrode identification, the design uses a simplified approach where the first and second electrode layers are formed through direct deposition processes, significantly reducing fabrication complexity while maintaining the ability to identify and distinguish electrode positions.
Solution Approach 2:
The patent employs a fabrication approach that uses temporary masking layers or sacrificial materials that are removed after serving their purpose, replacing the need for complex photolithography processes. This simplifies the overall fabrication procedure and reduces manufacturing costs.
3Stability of the object's composition
If sensing layer without openings is used, then layer integrity is maintained, but target substance contact efficiency deteriorates
Solution Approach 1:
The sensing layer incorporates a porous structure with controlled porosity, creating numerous small openings throughout the layer. This maintains the structural integrity and continuity of the sensing layer while dramatically increasing the surface area available for target substance interaction, thereby improving detection efficiency without compromising layer stability.
Solution Approach 2:
The sensing layer exhibits local quality variations with different regions having optimized pore sizes and distributions. The porous structure provides localized high-surface-area regions for enhanced target substance contact while maintaining overall layer integrity through the continuous matrix structure, achieving both goals simultaneously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The vertical type sensor achieves instant measurement with high sensitivity and reproducibility, reducing the need for expensive equipment and simplifying the detection process, while maintaining sensitivity even after repetitive use.
Implementation Method 1
the sensing layer is made of a material reactive to a target substance
Implementation Method 2
the sensing layer has a first porous structure with openings upwards corresponding to the openings of the second electrode layer
Implementation Method 3
the target substance contacts the sensing layer via the openings of the second electrode layer
Data Source
AI summary
The present invention provides a vertical type sensor, including a substrate; a first electrode formed on the substrate; a sensing layer formed on the first electrode layer and reactive to a target substance, wherein the first electrode layer is interposed between the substrate and the sensing layer; and a second electrode layer formed on the sensing layer and having a plurality of openings, wherein the sensing layer is interposed between the first electrode layer and the second electrode layer, and the target substance contacts the sensing layer via the plurality of openings. The vertical type sensor of the present invention provides instant, sensitive and rapid detection.