Vertical Optical Power Splitter With High-k Layer for Polarization Separation

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Solution Overview

Problem

Current silicon photonic devices are limited to either TE or TM mode due to sensitivity to polarization, leading to inefficiencies in light energy consumption and communication quality, and existing techniques fail to meet the increasing demand for high-speed, low-energy communication networks.

Innovation Solution

A silicon nitride photonics vertical polarization power splitter with asymmetric optical layers and a high k material layer between them, allowing for efficient separation of TE and TM modes, reducing insertion loss and enhancing polarization independence.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If conventional silicon photonic devices are used, then device simplicity is maintained, but polarization sensitivity causes transmission loss and limits communication quality

Engineering Contradiction:
Improvetransmission lossVSAvoiddevice structure
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent transitions from conventional two-dimensional planar waveguides to three-dimensional stacked waveguide structures. Multiple silicon nitride layers are vertically stacked with alternating orientations, creating a 3D photonic structure that enables polarization-independent operation while reducing transmission loss through enhanced light confinement and mode control.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs composite material structures by stacking multiple silicon nitride layers with different orientations and combining them with other materials. This composite approach creates effective medium properties that suppress polarization sensitivity and reduce transmission loss without significantly increasing device complexity.

Inventive Principle:
Principle #40Composite materials

2Reliability

If polarization-sensitive silicon photonic devices are used, then manufacturing simplicity is maintained, but communication quality and energy efficiency deteriorate

Engineering Contradiction:
Improvecommunication qualityVSAvoidmanufacturing process
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent divides the photonic structure into multiple discrete silicon nitride layers stacked vertically, each with specific orientations. This segmentation allows independent optimization of each layer's contribution to polarization independence while maintaining manufacturability through sequential deposition processes compatible with standard CMOS fabrication.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes key structural parameters including layer thickness, orientation angles, and stacking sequences to achieve polarization-independent operation. These parameter optimizations enhance communication quality and energy efficiency while remaining within the capabilities of existing manufacturing processes.

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If three-dimensional stacked waveguide structures are implemented, then polarization independence is achieved, but device complexity increases

Engineering Contradiction:
Improvepolarization independenceVSAvoidstructural complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent introduces asymmetry in the vertical stacking sequence and layer orientations to break polarization sensitivity. The asymmetric structure design enables polarization-independent operation by ensuring equivalent optical paths for different polarization modes, achieving adaptability without excessive structural complexity.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The stacked waveguide structure serves multiple functions simultaneously: it provides polarization independence, enhances light confinement, enables compact integration, and maintains compatibility with standard manufacturing. This multi-functionality achieves versatility without proportionally increasing device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves reduced transmission loss and increased polarization extinction ratio, enabling high component density and broadband polarization-independent communication.

Implementation Method 1

a high k material layer between them, allowing for efficient separation of TE and TM modes

Methodology Applied
Scientific EffectDielectric permittivity: Dielectric Permittivity

Data Source

PatentUS20260036744A1Optical power splitter and method of manufacturing the same
Publication Date: 2026.02.05 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20260036744A1 patent drawing
  • US20260036744A1 patent drawing
  • US20260036744A1 patent drawing

AI summary

An optical device is provided. The optical device includes a substrate, a first optical layer; a high k layer, and a second optical layer. The first optical layer is disposed on the substrate. The first optical layer comprises a top surface, a first sidewall, and a second sidewall opposite thereto. The high k layer is disposed on the top surface of the first optical layer. The second optical layer is disposed on the high k layer. The second optical layer includes a top surface, a third sidewall, and a fourth sidewall opposite thereto. The first sidewall of the first optical layer is misaligned with the third sidewall of the second optical layer. The second sidewall of the first optical layer is coplanar with the fourth sidewall of the second optical layer.