Vertical Stacked Decontamination Modules for Semiconductor Boxes
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Solution Overview
Problem
Current decontamination modules for semiconductor transport and storage boxes are inefficient in terms of space usage, compatibility with overhead hoist transport systems, and maintenance, leading to increased costs and productivity losses due to particulate contamination.
Innovation Solution
A compact treatment device comprising multiple decontamination modules stacked vertically, each with its own pumping system and gas control, integrated with a common chassis for efficient space use and independent operation, featuring acoustic and thermal insulation to prevent overheating, and a robot for efficient transfer of boxes between loading stations and decontamination chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple decontamination modules are used to achieve required throughput, then productivity is improved, but floor space occupied is increased
Solution Approach 1:
The patent transitions from horizontal arrangement of multiple decontamination modules to vertical stacking, utilizing the vertical dimension to increase throughput while minimizing floor space occupation. Multiple modules are stacked one above another, allowing parallel processing of multiple boxes simultaneously.
Solution Approach 2:
The patent combines multiple decontamination modules into a single integrated device with shared components. Common elements such as the overhead hoist transport interface, control systems, and structural support are merged across modules, reducing redundant space and infrastructure requirements.
2Area of stationary object
If decontamination modules are stacked vertically to reduce floor space, then area is reduced, but heat accumulation and overheating occur
Solution Approach 1:
The patent implements localized thermal management for each decontamination module, with individual cooling systems positioned adjacent to heat-generating components. This ensures that each module's thermal requirements are met independently, preventing heat accumulation in the vertical stack.
Solution Approach 2:
The patent introduces thermal insulation materials as intermediaries between stacked modules to prevent heat transfer from lower to upper modules. These insulating barriers allow close vertical positioning while maintaining independent thermal environments for each module.
3Object-affected harmful factors
If acoustic insulation is added to meet noise standards, then noise is reduced, but thermal insulation increases causing overheating
Solution Approach 1:
The patent divides the acoustic insulation system into separate sections for each decontamination module, with dedicated ventilation and cooling pathways integrated into each segmented unit. This allows noise reduction while maintaining thermal management independence.
Solution Approach 2:
The patent employs composite wall structures combining acoustic insulation materials with thermal management features. These composite constructions provide noise attenuation while incorporating heat dissipation channels or thermally conductive pathways to prevent overheating.
4Ease of repair
If individual maintenance of modules is enabled, then ease of repair is improved, but device complexity increases
Solution Approach 1:
The patent designs each decontamination module as a discrete, self-contained unit with standardized interfaces. This segmentation allows individual modules to be maintained, repaired, or replaced independently without affecting other modules, despite the overall system complexity.
Solution Approach 2:
The patent implements universal mounting standards and common interface protocols across all decontamination modules. This universality simplifies maintenance procedures and reduces the complexity burden by allowing standardized tools and procedures to be applied to any module in the stack.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces space occupation, maintains high throughput, ensures compatibility with existing infrastructure, allows for independent module maintenance, and minimizes costs while effectively reducing particulate contamination, thus enhancing semiconductor manufacturing efficiency and reducing waste.
Implementation Method 1
means of pumping the gases from the decontamination chamber
Implementation Method 2
compliance with noise standards entails confining the device inside an acoustically insulating chassis
Implementation Method 3
the acoustic insulating means necessarily have a thermal insulating capability, which encourages the components of the treatment device to heat up
Data Source
AI summary
A treatment device for transport and storage boxes according to the invention comprises a plurality of decontamination modules (24-27) supported by a common chassis (100) and arranged in a row of at least one column (23c) of modules superposed one on top of the other. Each decontamination module (24-27) comprises its own pumping means (6) having at least a primary pump (8a) housed in a primary pumping compartment (8c) that is longitudinally offset from the decontamination chamber (5). Access to the decontamination modules (24-27) is had via side access doors which are all oriented on one and the same access side and which are acted upon by actuating means that automatically close and open them. A lateral transfer zone is provided on the access side, and comprises a robot (29) capable of moving the transport and storage boxes between a frontal loading-unloading station (23a) and the decontamination chambers (5) of each of the decontamination modules (24-27). The amount of space occupied by and the throughput of the treatment device (23) are thus optimized.