Vertical Stacked Power Units for Substrate Processing Systems
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Solution Overview
Problem
The increasing number of processing chambers and larger power units in substrate processing systems lead to an expansion of the installation area, posing a challenge in efficiently utilizing limited space in semiconductor manufacturing factories.
Innovation Solution
The substrate processing system is designed with power units positioned below the processing modules, allowing for vertical stacking and efficient use of space, along with a supporting table and rail system that facilitates maintenance and movement of heavy units, thereby suppressing the increase in installation area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If power units are arranged on a different floor from processing chambers, then power supply reliability is improved, but installation area increases
Solution Approach 1:
The patent transitions from horizontal separation (different floors) to vertical integration (same floor, different levels). Power units are positioned below the processing chambers on the same floor, utilizing vertical space rather than horizontal expansion. This dimensional change allows power supply reliability to be maintained through dedicated power units while preventing installation area increase by stacking components vertically.
Solution Approach 2:
The patent implements a nested configuration where power units are placed underneath the processing chambers, similar to nested dolls. The power units are positioned in the space below the top plate of the processing chamber structure, allowing one component to be housed within the spatial envelope of another without increasing the overall footprint.
2Productivity
If the number of processing chambers is increased, then substrate processing capacity is improved, but installation area expands
Solution Approach 1:
The patent addresses the area expansion problem by arranging multiple processing chambers and power units in a vertical configuration on the same floor. Instead of horizontally expanding the facility to accommodate more chambers, the system stacks power units below the chambers, enabling increased processing capacity without proportional increases in installation area.
3Area of stationary object
If power units are positioned close to processing modules, then space utilization is improved, but heat dissipation becomes more difficult
Solution Approach 1:
The patent segments the power units from the main processing chamber body by positioning them in a separate space below the top plate. This segmentation allows close proximity for space efficiency while creating thermal separation, as the power units have their own dedicated space for heat management away from the sensitive processing chamber components.
Data Source
AI summary
A substrate processing system installed on a floor face is provided. The substrate processing system includes a substrate transfer module, a supporting table including a top plate disposed separately from the floor face, a plurality of substrate processing modules disposed on the top plate and coupled to the substrate transfer module along a lateral side of the substrate transfer module, and a plurality of power units disposed below the top plate. Further, the plurality of power units correspond to the plurality of substrate processing modules, respectively, and each of the power units is configured to supply electric power to the corresponding processing module.