Vertical Substrate Holder Rotation for Wafer Deformation Control

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Solution Overview

Problem

Substrates with large diameters, when processed in vertical processing tubes, often deform due to their weight, leading to non-uniform processing as they are held in a horizontal posture, which can result in processing inefficiencies and substrate deformation.

Innovation Solution

A substrate processing apparatus with a substrate holder that arranges substrates in a lateral direction within a vertical posture, featuring a fixing part to secure them vertically, and a rotation mechanism that rotates the holder to ensure uniform processing, utilizing a processing tube with a sealing part to maintain airtight conditions and gas supply/exhaust ports for uniform gas distribution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If substrates are held in a horizontal posture in a vertical processing tube, then the substrate can be processed, but the substrate deforms due to its own weight leading to non-uniform processing

Engineering Contradiction:

Improveprocessing uniformityVSAvoidsubstrate deformation

Core Design Contradiction:

Manufacturing precisionVSShape

Solution Approach 1:

The patent inverts the conventional horizontal substrate holding posture to a vertical posture. By rotating the substrate holder so that substrates are held vertically rather than horizontally, the gravitational force acts along the thickness direction of the substrate rather than causing bending deformation, thereby eliminating weight-induced deformation and achieving uniform processing across the substrate surface

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The patent introduces a rotation mechanism that dynamically adjusts the substrate orientation from horizontal to vertical posture. The substrate holder can rotate around the processing tube axis, transforming the static horizontal holding configuration into a dynamic system that achieves optimal vertical positioning during processing to prevent deformation

Inventive Principle:

Principle #15Dynamics

2Productivity

If substrates with large diameter are processed, then production capacity is improved, but substrate deformation increases due to weight

Engineering Contradiction:

Improveproduction capacityVSAvoidsubstrate deformation

Core Design Contradiction:

ProductivityVSShape

Solution Approach 1:

The patent applies the inversion principle specifically to large-diameter substrates by rotating them to vertical posture. This orientation change counteracts the increased gravitational effect on larger substrates, allowing production capacity to be increased with large-diameter substrates without suffering from the weight-induced deformation that would otherwise occur

Inventive Principle:

Principle #13The other way round (Inversion)

3Manufacturing precision

If substrates are held vertically, then deformation is reduced, but device complexity increases due to rotation mechanism

Engineering Contradiction:

Improveprocessing uniformityVSAvoidrotation mechanism

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The substrate holder is designed with multi-functionality, serving both as the mounting structure for substrates and as the rotating component that changes substrate orientation. This integration reduces the need for separate rotation mechanisms, thereby limiting the increase in device complexity while achieving the vertical holding configuration

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the substrate holding function with the rotation function into a single integrated substrate holder assembly. By combining these functions, the system avoids adding separate complex rotation mechanisms, thus achieving vertical substrate positioning with minimal increase in overall device complexity

Inventive Principle:

Principle #5Merging (Combining)

Data Source

PatentUS9117862B2Substrate processing apparatus, processing tube, substrate holder, fixing part of the substrate holder, substrate processing method, and substrate manufacturing method

Publication Date: 2015.08.25 KOKUSAI DENKI KK

AI summary

There is provided a substrate processing apparatus 101, comprising: a substrate holder 217 that holds a plurality of substrates (wafers) 200 in a state of being arranged in a lateral direction (approximately in a horizontal direction) approximately in a vertical posture; a processing tube 205 that houses the substrate holder 217; a throat side sealing part (throat side mechanical flange part) 2190 that air-tightly closes an opening part of the processing tube 205; a rotation part 255 that rotates the substrate holder 217 in a peripheral direction of the substrates, with an arrangement direction (a direction in which the substrates 200 are held) of the plurality of substrates 200 as a rotation axis, wherein the substrate holder 217 includes a fixing part (movable holding part 217c) and a fixture holding part 217a for fixing the substrates 200 approximately in a vertical posture.