Vertical Stacked Substrate Storage Transport Mechanism
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Solution Overview
Problem
The throughput of substrate processing apparatuses is limited due to the limited number of openers that can be mounted, which restricts the exchange time of substrate storing containers, hindering the increased processing capability and the need for more substrates to be processed per unit time.
Innovation Solution
A substrate processing apparatus with a storage device and transport device featuring first and second holders that can move independently among multiple platforms, allowing for efficient exchange and processing of substrates without increasing the apparatus' size, by holding and quickly swapping substrate storing containers between platforms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of openers is increased to improve substrate processing throughput, then productivity increases, but the apparatus size increases due to footprint constraints
Solution Approach 1:
The patent transitions from a horizontal arrangement of multiple openers to a vertical arrangement where multiple substrate storing containers are stacked on a single opener. This dimensional change allows the system to accommodate more containers without increasing the horizontal footprint, thereby maintaining productivity improvements while constraining apparatus size.
Solution Approach 2:
Multiple substrate storing containers are stacked vertically one on top of another on the same opener, creating a nested configuration. This allows multiple containers to occupy the same horizontal space, effectively increasing the number of containers that can be processed without expanding the apparatus footprint.
2Productivity
If the exchange time of substrate storing containers is reduced to improve throughput, then productivity increases, but the device complexity increases due to additional transport mechanisms
Solution Approach 1:
The transport device is designed with holders that can universally grip and transport any substrate storing container regardless of its position (horizontal or vertical). This multi-functional capability allows the same transport mechanism to handle containers from multiple vertical levels, reducing the need for separate transport mechanisms for each level and thereby limiting complexity increase.
Solution Approach 2:
The system pre-positions substrate storing containers on multiple platforms before processing begins. Containers are staged in advance on the storage device, allowing the transport mechanism to simply move them between predetermined locations rather than searching or positioning them dynamically, thus reducing exchange time without proportionally increasing complexity.
Data Source
AI summary
In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.