Vertical Topology Light Emitting Device for Uniform Current Injection

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Solution Overview

Problem

Conventional light emitting devices with horizontal topology face issues such as reduced light emission area, non-uniform current injection, and thermal conductivity problems due to the use of heterogeneous substrates, leading to inefficiencies and reliability concerns.

Innovation Solution

A light emitting device with a vertical topology is developed, featuring a first-conductivity-type semiconductor layer, a light emitting layer, and a second-conductivity-type semiconductor layer with an etch barrier layer, allowing for uniform light extraction and improved manufacturing through photo-electrochemical etching to control the etch depth and surface shape.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional horizontal topology is used, then manufacturing process is simple, but light emission area is reduced and current injection is non-uniform

Engineering Contradiction:
Improvelight emission area uniformityVSAvoiddevice topology structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent transitions from horizontal topology to vertical topology, changing the spatial arrangement dimension of the semiconductor layers. This dimensional change allows the light emitting layer to be positioned vertically between n-type and p-type semiconductor layers, enabling uniform current injection from the bottom substrate while maintaining large light emission area at the top surface, thereby resolving the contradiction between manufacturing simplicity and emission uniformity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent inverts the conventional horizontal structure by stacking layers vertically with the n-type semiconductor layer at the bottom, light emitting layer in the middle, and p-type semiconductor layer at the top. This inversion allows current to be injected uniformly from the large-area bottom electrode through the vertical structure, solving the non-uniform current injection problem while maintaining manufacturing feasibility through standard vertical epitaxial growth processes.

Inventive Principle:
Principle #13The other way round (Inversion)

2Reliability

If heterogeneous substrate is used in horizontal topology, then device fabrication is easier, but thermal conductivity is poor and reliability is reduced

Engineering Contradiction:
Improvethermal management and device reliabilityVSAvoidsubstrate integration complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent extracts and removes the heterogeneous substrate from the final device structure. The vertical topology is grown epitaxially on a temporary substrate, then the substrate is removed and replaced with a transparent electrode and encapsulation structure. This extraction eliminates the thermal conductivity limitations of heterogeneous substrates while maintaining ease of manufacture through standard vertical growth processes followed by substrate release techniques.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces a transparent electrode as an intermediary between the removed substrate and the vertical semiconductor structure. This intermediary maintains the electrical and mechanical connection while allowing optical transmission, enabling the device to function without the thermal limitations of the original heterogeneous substrate while preserving manufacturing simplicity.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Manufacturing precision

If etch barrier layer is added for precise etch depth control, then manufacturing precision is improved, but device structure complexity increases

Engineering Contradiction:
Improveetch depth control precisionVSAvoidsemiconductor layer structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies a preliminary etch barrier layer treatment to the semiconductor surface before the main etching process. This preliminary action of depositing a thin barrier layer with different etch selectivity allows precise control of the etch depth by stopping the etch process at a predetermined depth, thereby achieving high manufacturing precision while adding only a thin functional layer rather than complex structural elements.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The vertical topology enhances light emission efficiency and reliability by maintaining the light emission area and ensuring uniform current injection, while the etch barrier layer enables precise control of the etch depth, addressing the limitations of conventional devices.

Implementation Method 1

photo-electrochemical etching to control the etch depth and surface shape

Methodology Applied
Scientific EffectPhoto-electrochemical etching: Photoelectric Effect

Data Source

PatentUS7705363B2Light emitting device having a light extraction structure
Publication Date: 2010.04.27 SUZHOU LEKIN SEMICON CO LTD
  • US7705363B2 patent drawing
  • US7705363B2 patent drawing
  • US7705363B2 patent drawing

AI summary

A light emitting device having a vertical topology, which is capable of achieving an enhancement in light emission efficiency and reliability, and a method for manufacturing the same are disclosed. The light emitting device includes a first-conductivity-type semiconductor layer, a light emitting layer arranged over the first-conductivity-type semiconductor layer, and a second-conductivity-type semiconductor layer arranged on the light emitting layer. The second-conductivity-type semiconductor layer includes an etch barrier layer.