Vertical Heat Processing Transfer Mechanism Motor Feedback Control
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Solution Overview
Problem
Vertical-type heat processing apparatuses face challenges in preventing damage to wafers and holders due to abnormal circumstances during transfer operations, as existing vibration sensors have limited detection precision and speed, leading to increased costs and complexity.
Innovation Solution
A vertical-type heat processing apparatus with a transfer mechanism that includes a controller monitoring position, velocity, and current feedback to motors, allowing for immediate detection and stopping of abnormal drives without the need for vibration sensors, thereby preventing damage to wafers and holders.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a vibration sensor is disposed on the transfer mechanism to detect abnormal circumstances, then damage to wafers and holder can be restrained, but the structure becomes complicated and costs increase
Solution Approach 1:
The patent replaces the mechanical vibration sensor detection system with an electrical control system that monitors motor current, position, and velocity feedback signals. The controller detects abnormalities by analyzing deviations in these electrical parameters from predetermined normal ranges, eliminating the need for separate vibration sensors and their associated mechanical structures.
Solution Approach 2:
The system continuously monitors feedback signals from the motor (current, position, velocity) and compares them against predetermined normal ranges. When deviations indicate abnormal circumstances, the controller automatically stops the transfer mechanism, providing real-time feedback-based protection without additional sensors.
2Reliability
If a vibration sensor is used to detect abnormal circumstances, then damage can be prevented, but detection precision and detection speed are limited
Solution Approach 1:
The patent replaces the mechanical vibration sensor with an electrical parameter monitoring system that measures current, position, and velocity directly. These electrical measurements provide more precise and faster detection of abnormal conditions compared to mechanical vibration detection, as they can detect changes in the motor's operational parameters in real-time.
Solution Approach 2:
The controller acts as an intermediary that monitors the motor's electrical parameters (current, position, velocity) which serve as indirect indicators of abnormal circumstances. This intermediary measurement approach provides more precise and faster detection than direct vibration sensing.
3Reliability
If a vibration sensor is disposed on the substrate supporter, then abnormal circumstances can be detected, but costs increase
Solution Approach 1:
The controller serves multiple functions: it controls the transfer mechanism operation and simultaneously monitors for abnormal circumstances by analyzing motor feedback signals. This multi-functionality eliminates the need for separate detection devices, reducing manufacturing costs while maintaining reliable abnormal condition detection.
Solution Approach 2:
The transfer mechanism's motor and controller perform self-diagnosis by monitoring their own operational parameters (current, position, velocity). The system detects abnormalities in itself without requiring external sensors, thereby reducing costs while maintaining detection capability.
Data Source
AI summary
The present invention is a vertical-type heat processing apparatus comprising: a heat processing furnace; a holder capable of being loaded into the heat processing furnace and unloaded therefrom, with holding therein a plurality of objects to be processed at predetermined vertical intervals in a tier-like manner; a transfer mechanism including a base table capable of vertically moving and rotating, and a substrate supporter capable of horizontally moving on the base table; and a controller for controlling the transfer mechanism; wherein the transfer mechanism is adapted to transfer an object to be processed between a container containing a plurality of objects to be processed at predetermined intervals, and the holder; the substrate supporter includes a to-and-fro driving part for driving the substrate supporter in the horizontal direction, and a pitch-change driving part for changing a pitch at which the objects to be processed are supported; the controller is adapted to monitor at least one information of position, velocity and current fed back to a motor for driving the transfer mechanism; and the controller is adapted to judge, by comparing the monitored information with predetermined information corresponding to a normal drive, that the transfer mechanism is abnormally driven, and then is adapted to stop the drive of the transfer mechanism.