Via with Side Barrier Layer in Encapsulation

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Solution Overview

Problem

Current package-on-package (PoP) configurations are too large and costly, posing challenges for mobile computing devices, and the fabrication process is complex and inefficient.

Innovation Solution

An integrated device with a through encapsulation via (TEV) that includes a side barrier layer, which traverses the encapsulation layer, providing a more compact and cost-effective solution by using a photo-patternable encapsulation layer and a barrier layer to facilitate high-density interconnects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If package-on-package (PoP) configuration is used to achieve higher density connections, then connection density is improved, but device size and fabrication complexity increase

Engineering Contradiction:
Improveconnection densityVSAvoidfabrication complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The encapsulation layer is divided into multiple segments: a first portion and a second portion, allowing different regions to serve different functions. This segmentation enables the via structure to traverse through specific portions while maintaining encapsulation integrity in other areas, facilitating high-density interconnects without requiring complete penetration of the encapsulation layer.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The via structure is configured to traverse the encapsulation layer in a vertical dimension, creating three-dimensional interconnect pathways. This dimensional approach allows connections to be established through the encapsulation layer without increasing the lateral footprint of the device, thereby achieving higher connection density within a compact form factor.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Volume of moving object

If through encapsulation vias are implemented to reduce device size, then form factor is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvedevice sizeVSAvoidmanufacturing complexity
Core Design Contradiction:
Volume of moving objectVSEase of manufacture

Solution Approach 1:

The barrier layer is applied selectively to specific portions of the via structure rather than uniformly across the entire via. This local quality approach places the barrier layer only where it is needed to prevent diffusion between the via fill material and the encapsulation layer, simplifying the manufacturing process compared to applying barrier layers to all via surfaces.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The barrier layer is formed on the via structure before the via is filled with conductive material. This preliminary action prevents diffusion issues during subsequent filling processes and eliminates the need for complex post-fill barrier applications, thereby reducing overall manufacturing complexity.

Inventive Principle:
Principle #10Preliminary action

3Reliability

If barrier layer is added to via structure to prevent diffusion, then reliability is improved, but device complexity increases

Engineering Contradiction:
Improvediffusion preventionVSAvoidvia structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The barrier layer function is extracted and applied only to specific portions of the via structure where diffusion prevention is most critical, rather than applying it to the entire via. This selective approach maintains reliability by preventing diffusion at key interfaces while reducing the overall complexity of the via structure.

Inventive Principle:
Principle #2Taking out (Extraction)

Data Source

PatentEP3105787B1Integrated device comprising via with side barrier layer traversing encapsulation layer
Publication Date: 2021.08.25 QUALCOMM INC
  • EP3105787B1 patent drawingFigure 1~2
  • EP3105787B1 patent drawingFigure 3~4
  • EP3105787B1 patent drawingFigure 5A

AI summary

Some novel features pertain to an integrated device that includes an encapsulation layer, a via structure traversing the encapsulation layer, and a pad. The via structure includes a via that includes a first side, a second side, and a third side. The via structure also includes a barrier layer surrounding at least the first side and the third side of the via. The pad is directly coupled to the barrier layer of the via structure. In some implementations, the integrated device includes a first dielectric layer coupled to a first surface of the encapsulation layer. In some implementations, the integrated device includes a substrate coupled to a first surface of the encapsulation layer. In some implementations, the integrated device includes a first die coupled to the substrate, where the encapsulation layer encapsulates the first die. In some implementations, the via includes a portion configured to operate as a pad.