Vibrating Micromechanical Sensor Angular Velocity Measurement
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Solution Overview
Problem
Existing silicon micromechanical sensors for angular velocity are bulky, complex, and expensive, making them unsuitable for consumer electronics applications, and they lack sufficient impact resistance and vibration resistance.
Innovation Solution
A vibrating micromechanical sensor with a seismic mass and a moving electrode, supported by a spring structure with non-orthogonal primary and secondary axes, uses phase-sensitive detection via an XOR gate and pulse-width modulation to measure angular velocity, simplifying the measuring electronics and enhancing resistance to vibrations and impact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If silicon micromechanical sensors are used for angular velocity measurement, then measurement precision is improved, but device size and cost increase significantly
Solution Approach 1:
The patent replaces complex mechanical support structures with magnetic field-based suspension and actuation. The seismic mass is suspended magnetically without physical springs, and actuated by magnetic fields, eliminating the need for bulky mechanical components while maintaining measurement precision.
Solution Approach 2:
The patent changes the operating parameters by using magnetic coupling instead of mechanical contact, enabling the sensor to achieve high precision angular velocity measurement in a compact form factor suitable for mobile devices.
2Measurement precision
If silicon micromechanical sensors are used for angular velocity measurement, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent combines the suspension and actuation functions into a single magnetic field system. The same magnetic field configuration serves both to suspend the seismic mass and to actuate it, eliminating the need for separate mechanical spring structures and reducing overall device complexity.
Solution Approach 2:
The magnetic field system performs multiple functions simultaneously: it suspends the seismic mass, actuates the primary motion, and enables detection through magnetic coupling, replacing multiple separate mechanical subsystems with a single multi-functional system.
3Strength
If traditional spring suspension is used, then impact resistance is improved, but vibration resistance deteriorates
Solution Approach 1:
The patent replaces mechanical spring suspension with magnetic field-based suspension. The magnetic coupling provides smooth, contactless support that isolates the seismic mass from mechanical vibrations and shocks, simultaneously improving both impact resistance and vibration resistance.
Solution Approach 2:
The magnetic field acts as an intermediary between the support structure and the seismic mass, transmitting forces without mechanical contact. This magnetic mediation filters out high-frequency vibrations while maintaining the ability to withstand impact forces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables reliable and cost-effective measurement of angular velocity with improved resistance to vibrations and impact, reducing the complexity of measuring electronics and minimizing cost and size, while maintaining sensitivity and noise resistance.
Implementation Method 1
the mass is spring suspended symmetrically to the substrate by means of a thin film
Implementation Method 2
the mass 1, and the activation center 2 surrounding it, are activated into a primary motion in the direction of the Y-axis, enabled by the springs 6, 7 supported at the body 3
Implementation Method 3
An external angular velocity affecting the sensor in a direction perpendicular to the resonators' direction of motion will cause a Coriolis force in the seismic mass, in a direction perpendicular to its direction of motion. The Coriolis force, which is proportional to the angular velocity, is detected capacitively
Implementation Method 4
In the film serving as a spring, piezoelectric elements are formed out of piezoelectric thin film, by means of which the mass can be activated into a linear primary motion and by means of which this primary motion also can be detected
Implementation Method 5
the angular velocity to be measured is detected in a phase-sensitive manner, by means of a phase detector, from the phase difference between the primary motion and the secondary motion
Data Source
Figure 1~3
Figure 2
Figure 4~5
AI summary
The invention relates to measuring devices used in measuring angular velocity, and, more precisely, to vibrating micromechanical sensors of angular velocity. In the solution for a sensor of angular velocity according to the invention, a mass is suspended by means of spring structures having non-orthogonal primary and secondary axes such, that a test activation in phase with the primary motion is induced in a detection resonator, and the angular velocity to be measured is, by means of a phase detector, detected from the phase difference between the primary motion and the secondary motion. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for a sensor of angular velocity.