Vibration-Generating Nozzle Geometry for High-Pressure Cleaning
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Solution Overview
Problem
High-pressure cleaning systems for flat panel displays and semiconductor wafers require complex configurations with separate ultrasonic generators to improve detergency, which complicates the system design.
Innovation Solution
A nozzle design with vibration generating flow channels that use a combination of supply, drawing, and accelerating flow channels to create vibrating flows without the need for an ultrasonic generator, generating vibrating flows through flow separation and reattachment, bubble formation, and periodic expansion, enhancing detergency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an ultrasonic wave generator is added to improve detergency, then cleaning performance is improved, but device complexity increases
Solution Approach 1:
The patent merges the ultrasonic vibration generation function directly into the nozzle structure by incorporating a piezoelectric element as the vibration generation unit within the nozzle body, eliminating the need for a separate ultrasonic wave generator and reducing overall system complexity while maintaining enhanced detergency performance
Solution Approach 2:
The nozzle is designed to perform multiple functions: it serves as both the liquid ejection device and the ultrasonic vibration source. The vibration generation unit integrated into the nozzle provides ultrasonic waves directly at the ejection point, making the nozzle a multi-functional component that combines fluid delivery and vibration generation
2Speed
If flow channel diameter is reduced to increase ejection velocity, then cleaning efficiency improves, but flow rate decreases
Solution Approach 1:
The patent employs dynamic diameter variation along the flow channel, with the diameter gradually decreasing from the inlet toward the outlet. This dynamic geometry allows the flow channel to adapt to changing flow conditions, maintaining high ejection velocity while accommodating sufficient flow rate through the tapered configuration
Solution Approach 2:
The flow channel diameter parameter is changed progressively along the flow direction, creating a tapered profile that optimizes both velocity and flow rate. The gradual diameter reduction transforms the flow characteristics to achieve high-speed ejection without excessive flow rate loss
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The nozzle configuration simplifies the system by eliminating the need for an ultrasonic generator while achieving improved detergency through increased ejection velocity and surface pressure distribution, resulting in higher removal rates and improved cleaning efficiency.
Implementation Method 1
generating vibrating flows through flow separation and reattachment, bubble formation, and periodic expansion
Implementation Method 2
generating vibrating flows through flow separation and reattachment, bubble formation, and periodic expansion
Implementation Method 3
a high-pressure pump connected to the nozzle to pressurize the liquid and to supply the liquid to the nozzle
Data Source
AI summary
A nozzle include a first portion, a second portion joined to the first portion, and a third portion joined to the second portion. The first portion includes a first inner wall surface and a first flow channel including a first inlet and a first outlet. The second portion includes a second inner wall surface and a second flow channel including a second inlet having an inner diameter less than an inner diameter of the first outlet and a second outlet. The third portion includes a third inner wall surface and a third flow channel including a third inlet having an inner diameter greater than the inner diameter of the second outlet and a third outlet. The third flow channel includes a diameter-decreasing section having an inner diameter that gradually decreases and a straight section having an inner diameter less than the inner diameter of the second outlet and constant.