Vibrating Reed Groove Electrode Design for Gyrosensor Sensitivity
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Solution Overview
Problem
Miniaturization of gyrosensors leads to decreased detection sensitivity due to weakened electric fields caused by narrowed electrode areas, and enlarging electrodes can result in electric charge loss when the detection unit vibrates in the thickness direction.
Innovation Solution
A vibrating reed design with a groove on its detection unit, where the groove bottom is positioned between the main surfaces, and non-electrode areas are created on the outside surfaces to prevent reverse electric charge loss, allowing for enlarged electrode areas and improved electric field efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the area of electrodes is narrowed due to miniaturization, then the size of the gyrosensor is reduced, but the detection sensitivity decreases
Solution Approach 1:
The invention transitions from a conventional planar electrode arrangement to a three-dimensional configuration by forming electrodes on both the inside surface and outside surface of a groove. This multi-surface electrode arrangement increases the effective electrode area without increasing the planar footprint, thereby maintaining detection sensitivity while achieving miniaturization of the gyrosensor.
Solution Approach 2:
The groove structure is formed within the detection unit, with electrodes nested on its inside and outside surfaces. This nested configuration allows the electrodes to be positioned in a compact space, maximizing the use of available volume while maintaining sufficient electrode area for sensitive detection.
2Measurement precision
If the area of electrodes is enlarged to improve detection sensitivity, then the detection sensitivity increases, but electric charge loss occurs when the detection unit vibrates
Solution Approach 1:
The invention applies different electrode configurations to different locations: electrodes are formed on the inside surface of the groove to maximize sensitivity, while the outside surface electrode is strategically positioned to avoid regions that would cause charge loss during vibration. This localized optimization resolves the contradiction between sensitivity and charge loss.
Solution Approach 2:
Instead of extending electrodes to the end surface as conventionally done, the invention inverts the approach by positioning the outside surface electrode to end before the end surface, creating a non-electrode-formed area at the end surface that prevents charge loss while maintaining sufficient electrode area for sensitivity.
3Area of stationary object
If electrodes are formed on the entire outside surface to maximize electrode area, then the electrode area is increased, but reverse electric charge loss occurs due to vibration
Solution Approach 1:
The invention extracts or removes the electrode formation from the end surface area of the outside surface, creating a non-electrode-formed area. This selective removal eliminates the source of reverse charge loss while preserving the electrode area on the inside surface and the functional portion of the outside surface, thereby resolving the contradiction between maximizing electrode area and preventing charge loss.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances detection sensitivity by minimizing electric charge loss and increasing the efficiency of the electric field, maintaining or improving sensitivity even in miniaturized devices.
Implementation Method 1
an electric field is generated in the X direction in the detection unit by the piezoelectric effect
Implementation Method 2
a drive unit that is subjected to an in-plane vibration in the X direction in the X-Y plane is then changed to be subjected to an out-of-plane vibration in the Z axis direction (the thickness direction of the vibrating reed) by the action of the Coriolis force
Data Source
AI summary
The vibrating reed includes a detection unit that vibrates along the thickness direction of a piezoelectric body when detecting. The detection unit includes a first main surface and a second main surface that face each other in the thickness direction, outside surfaces, a groove that has a groove bottom at a position between the first main surface and the second main surface in a depth direction from an opening provided in the first main surface, an outside surface electrode that is formed on the outside surfaces, and an inside surface electrode that is formed on an inside surface which is opposite the outside surfaces. At least one of the outside surfaces has a non-electrode-formed area where the outside surface electrode is not provided in an area from the end surface which positioned on the second main surface side in the thickness direction to the second main surface.