Vibration Mechanism for Uniform ALD Coating of Particulate Matter
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Solution Overview
Problem
In atomic layer deposition (ALD) processes for coating particulate matter, existing methods face challenges in ensuring uniform coating due to agglomeration and incomplete precursor coverage, as particulate matter tends to agglomerate and precursors do not reach all surfaces effectively.
Innovation Solution
An apparatus and method that incorporate a vibration mechanism within the reaction chamber to fluidize particulate matter, combined with a vacuum chamber and precursor system, ensuring that gaseous precursors evenly coat the particulate matter by creating movement and using heating for optimal fluidization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If particulate matter is processed in a fluidized bed to enable uniform coating, then precursor coverage is improved, but particulate matter agglomeration occurs
Solution Approach 1:
The patent introduces a vibration mechanism that vibrates the reaction chamber or container holding the particulate matter. This mechanical vibration prevents agglomeration by keeping particles in constant motion and ensures uniform precursor coverage by exposing all particle surfaces to the gaseous precursors, thereby resolving the contradiction between coating uniformity and particle dispersion stability.
2Manufacturing precision
If vibration is applied to prevent agglomeration and ensure uniform coating, then coating quality is improved, but device complexity increases
Solution Approach 1:
The vibration mechanism serves multiple functions: it prevents particulate matter agglomeration, ensures uniform precursor coverage, and maintains particle fluidization throughout the reaction chamber. By consolidating these functions into a single mechanism, the patent minimizes the increase in device complexity while achieving improved coating quality.
3Manufacturing precision
If pressurized gas is introduced to fluidize particulate matter, then coating coverage is improved, but energy consumption increases
Solution Approach 1:
The patent replaces or supplements the energy-intensive pressurized gas fluidization system with a mechanical vibration mechanism. This substitution reduces energy consumption by using mechanical oscillations instead of continuous high-pressure gas flow to achieve particle fluidization and uniform precursor coverage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves uniform coating of particulate matter by ensuring gaseous precursors reach all surfaces, preventing agglomeration and enhancing the ALD process efficiency within a controlled vacuum environment.
Implementation Method 1
a vibration mechanism for vibrating the particulate matter inside the reaction chamber
Implementation Method 2
The vibration of the particulate matter assists in fluidization so that the first and second gaseous precursors reach all over the particulate matter
Implementation Method 3
The fluidization may further be assisted through heating and in a preferred embodiment of the invention at least one heater is arranged in the vacuum chamber for providing heat to the reaction chamber
Implementation Method 4
In ALD applications, typically two gaseous precursors are introduced into the ALD reactor in separate stages. The gaseous precursors effectively react with the substrate surface, resulting in deposition of a single atomic layer
Data Source
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AI summary
The invention relates to an apparatus and method for processing particulate matter by exposing the particulate matter to successive surface reactions of at least a first and a second gaseous precursor according to the principles of atomic layer deposition method. The apparatus comprises a vacuum chamber (1), a reaction chamber (2) for particulate matter, the reaction chamber (2) provided inside the vacuum chamber (1), a vibration mechanism (3) for vibrating particulate matter inside the reaction chamber (2); and a precursor system (4) arranged to supply the at least first and second gaseous precursors through the reaction chamber (2) for subjecting the particulate matter to the at least first and second gaseous precursors. The method comprises the steps of supplying the at least first and second gaseous precursors through the reaction chamber (2) for subjecting the particulate matter to the at least first and second gaseous precursors, and vibrating particulate matter inside the reaction chamber (2).