Vibration Element Torsional Beam Asymmetric Etching
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Solution Overview
Problem
Vibration elements used in optical scanners face challenges with beam damage due to large deflection angles, and existing strengthening structures are complex and not straightforward to implement.
Innovation Solution
A vibration unit is designed with a frame and a beam connecting the vibration element, where an etching process is applied to both surfaces of a substrate, with the meeting point of the etching processes positioned off-center, enhancing the mechanical strength of the torsional beam by reducing shear stress and preventing notch formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the deflection angle is increased to achieve higher resolution and faster scanning, then the vibration element's performance is improved, but the beam becomes easily damaged during vibration
Solution Approach 1:
The patent applies asymmetry by positioning the meeting point of the first and second etching processes at an off-center location relative to the beam's center position in the width direction. This asymmetric etching configuration creates a non-uniform stress distribution that prevents the formation of harmful notches at the beam's center, thereby improving beam durability while allowing large deflection angles for high-resolution scanning
2Reliability
If the beam structure is strengthened to prevent damage, then beam durability is improved, but the structural complexity increases
Solution Approach 1:
The patent changes the geometric parameter of the beam by controlling the etching process to create a specific off-center meeting point configuration. This parameter change in the etching geometry inherently strengthens the beam by preventing notch formation, eliminating the need for additional complex strengthening structures while improving beam durability
Data Source
AI summary
A vibration unit including a frame, a vibration element including a substrate configured to vibrate, and a beam configured to connect the vibration element to the frame. The vibration unit is produced by applying an etching process to at least two surfaces of a substrate. A meeting position of the two surfaces of the substrate is located where a first etching process, which takes place on a first surface of the substrate and a second etching process, which takes place on a second surface of the substrate meet, and is located at a position other than a center position in a width direction of the beam.