Vibration Isolation System with Active Acoustic Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing vibration isolation systems, particularly in the semiconductor industry, fail to adequately account for environmental influences such as sound waves and resonance effects, leading to impaired isolation performance due to interactions with surrounding surfaces and air movements.
Innovation Solution
The vibration isolation system is designed to adapt to its environment by incorporating sound-insulating materials, structuring surfaces to reduce resonance, and using active control with loudspeakers to mitigate noise and ambient disturbances, while minimizing plane-parallel surfaces and optimizing surface geometry to minimize the Casimir effect.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If plane-parallel surfaces are used in the vibration isolation system, then the structure is simple and manufacturing is easy, but resonance effects occur that impair the isolation performance
Solution Approach 1:
The patent applies curvature to the base plate by providing roundings at the edges and openings in the plate, eliminating plane-parallel surfaces that cause resonance. This curved/non-planar geometry prevents the formation of resonance volumes between the base plate and floor, thereby maintaining isolation performance while remaining manufacturable.
2Reliability
If sound-insulating material is applied to surrounding walls and components, then resonance effects are reduced and isolation performance improves, but the device complexity and manufacturing cost increase
Solution Approach 1:
The patent extracts the sound insulation function from the surrounding environment (walls, floors) and transfers it to the vibration isolation system itself by providing sound-insulating material on the base plate and/or load holder. This makes the system self-contained and reduces dependence on the acoustic properties of the installation environment.
3Reliability
If active control with loudspeakers is implemented to reduce noise disturbances, then the isolation effect is enhanced in noisy environments, but the device complexity and energy consumption increase
Solution Approach 1:
The patent employs active control loudspeakers that automatically detect and counteract noise disturbances without requiring external intervention. The system uses sensors to detect vibrations and controls loudspeakers to generate counteracting sound waves, enabling the system to self-regulate and maintain isolation performance in varying acoustic environments.
4Manufacturing precision
If the base plate and surrounding surfaces are made plane-parallel, then the manufacturing precision is easier to achieve, but the Casimir effect causes additional forces that disturb the system
Solution Approach 1:
The patent eliminates plane-parallel surfaces between the base plate and surrounding structures by providing roundings and openings in the base plate. This non-planar geometry prevents the formation of narrow gaps that would generate Casimir forces, thereby eliminating this harmful effect while maintaining manufacturability through standard forming operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the isolation effect by reducing resonance and noise disturbances, improving the system's performance in noisy environments by actively managing acoustic impedance and flow resistance, thereby maintaining effective vibration isolation even in challenging conditions.
Implementation Method 1
bodies surrounding the vibration isolation system, in particular walls, are provided with sound-insulating material at least in sections. In this way, resonance effects that impair the effectiveness of the vibration isolation system can be reduced
Implementation Method 2
Resonance volumes, which arise in particular as a result of plane-parallel surfaces, are recorded and suitable measures such as structuring walls or applying soundproofing material are carried out in order to eliminate the resonance volumes
Implementation Method 3
at least one loudspeaker can be arranged in the vicinity of the vibration isolation system, which loudspeaker has active control. Sound waves resulting from system vibrations can be reduced by actively controlling the loudspeakers
Implementation Method 4
a base mass, on which a load to be isolated is arranged, is mounted on a floor isolated from vibrations by vibration isolators (4)
Data Source
Figure 1~2
Figure 3
Figure 4
AI summary
The method involves providing an vibration isolation system (10), and determining form, material, mass and/or distance of a body that surrounds the vibration isolation system. Constructive measures for the vibration isolation system and/or a surrounding area, in which the system is attached, are determined for reducing surrounding area influences on the basis of the detected area. The constructive measures are implemented at the system and/or the area, where the implementation of the measures comprises controlling of loud speakers arranged in the area for active isolation. An independent claim is also included for an arrangement with an vibration isolation system.