Vibration Isolation Layer for Probe Station Alignment Stability
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Solution Overview
Problem
Conventional probe stations experience misalignment and relative motion between optical probes and devices under test due to external vibrations, degrading test quality.
Innovation Solution
A vibration isolation layer with a platform and mechanisms that support the platform relative to a mounting region, allowing relative motion to isolate vibrations and maintain consistent alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional probe stations are used in a test environment with external vibrations, then the measurement system can perform optical testing, but misalignment and relative motion occur between optical probes and devices under test
Solution Approach 1:
A vibration isolation layer is introduced as an intermediary between the mounting region and the platform supporting the optical probes. This layer includes vibration isolation mechanisms that decouple the measurement system from external vibrations, preventing vibration transmission while maintaining operational functionality.
Solution Approach 2:
The vibration isolation functionality is extracted as a separate layer distinct from the mounting region and the measurement system. This modular approach allows the vibration isolation mechanisms to be independently configured and optimized without affecting the core measurement capabilities.
2Reliability
If vibration isolation mechanisms are added to the measurement system, then vibration isolation is achieved, but device complexity increases
Solution Approach 1:
The vibration isolation layer is segmented into multiple independent vibration isolation mechanisms positioned at different locations. Each mechanism can be optimized independently, and the modular design allows for easier installation, maintenance, and adjustment without requiring complex integrated systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces vibrations, ensuring consistent and precise optical measurements by minimizing relative motion and maintaining alignment between optical probes and devices under test.
Implementation Method 1
The plurality of vibration isolation mechanisms may be positioned to support the platform relative to a mounting region that supports the vibration isolation layer and/or may be configured to permit relative motion between the platform and the mounting region to vibrationally isolate the platform from the mounting region
Data Source
AI summary
Vibration isolation layers, measurement systems that include the vibration isolation layers, and related methods are disclosed herein. The vibration isolation layers include a platform and a plurality of vibration isolation mechanisms positioned to support the platform relative to a mounting region that supports the vibration isolation layer. The platform may define an upper surface configured to support a supported assembly that includes at least one of a probe station and a loader. The platform may define a recess sized to receive at least a region of the probe station and/or the loader. The recess may extend into the platform. The plurality of vibration isolation mechanisms may be positioned to support the platform relative to a mounting region that supports the vibration isolation layer and/or may be configured to permit relative motion between the platform and the mounting region to vibrationally isolate the platform from the mounting region.