Pneumatic Vibration Isolator with Restricted Gas Flow for Soft Landing

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Solution Overview

Problem

Pneumatic vibration isolators are prone to membrane rupture, leading to sudden pressure drops and potential damage to sensitive payloads, especially when multiple isolators support a heavy load, as the increased load on remaining isolators can cause them to rupture as well, resulting in a crash.

Innovation Solution

A vibration isolator design featuring at least two pressurized gas compartments connected via a tubing system with restrictions that reduce the cross-sectional area by at least 50%, allowing for a controlled gas flow and 'soft landing' in case of membrane rupture, and an optional damping chamber to stabilize pressure changes and prevent overshooting.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Force

If multiple pneumatic vibration isolators are arranged next to each other to support a heavy payload, then the payload can be supported, but rupture of the membrane in one vibration isolator causes a sudden increase in the load on the remaining vibration isolators, which may lead to the membranes of these vibration isolators to rupture as well

Engineering Contradiction:
Improvesupport capacityVSAvoidsystem reliability
Core Design Contradiction:
ForceVSReliability

Solution Approach 1:

The system is divided into multiple independent gas compartments, each capable of supporting a portion of the payload. The segmentation is further enhanced by introducing flow restrictions in the tubing system that create functional isolation between compartments, so that failure of one compartment does not immediately affect the others.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Flow restrictions are pre-installed in the tubing system connecting the gas compartments. These restrictions act as a protective measure in advance, limiting the rate at which gas can flow between compartments. In case of membrane rupture, this pre-configured restriction prevents sudden pressure equalization and gradual load transfer to remaining compartments, cushioning the system against catastrophic failure.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

2Ease of operation

If a membrane in a gas compartment ruptures causing a sudden drop in air pressure, then the isolator fails, but the payload will inevitably crash down causing a shock to the payload and possibly damaging it

Engineering Contradiction:
Improveisolator functionalityVSAvoidshock to payload
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The tubing system with flow restrictions acts as an intermediary between the gas compartments. When one compartment experiences membrane rupture, this intermediary element controls the interaction between compartments by limiting gas flow rate, thereby preventing the harmful effect of sudden pressure equalization and payload crash.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The flow restrictions are pre-configured in the tubing system to provide cushioning protection. In case of membrane rupture, these restrictions ensure that pressure equalization occurs gradually rather than suddenly, cushioning the payload against shock damage before the failure fully propagates through the system.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

3Reliability

If the cross section of the tubing system is reduced significantly at restrictions, then gas flow between compartments is limited providing protection, but the tubing system complexity increases

Engineering Contradiction:
Improvefailure protectionVSAvoidtubing system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Instead of making the entire tubing system complex, flow restrictions are introduced only at specific critical locations where tubing connects gas compartments. This local application of complexity achieves the desired flow limitation and failure protection without requiring the entire tubing system to be overly complex.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents sudden drops and damage to payloads by distributing pressure and ensuring a controlled descent, while the damping chamber enhances control loop stability and reduces pressure noise.

Implementation Method 1

at least two pressurized gas compartments arranged next to each other to support the contact member at different locations

Methodology Applied
Scientific EffectGas pressure: Pressure Increase

Implementation Method 2

the tubing system contains at least one restriction at which a cross section of the tubing system is reduced by at least 50%

Methodology Applied
Scientific EffectGas flow restriction: Flow Separation

Implementation Method 3

the at least one second gas compartment will also loose pressure by its gas flowing through the tubing system and being released through the broken gas compartment

Methodology Applied
Scientific EffectPressure equalization: Pressure Gradient

Implementation Method 4

A gap between the rim of the opening of the first air chamber and the piston is covered by an annular flexible rolling diaphragm or membrane

Methodology Applied
Scientific EffectFlexible membrane containment: Physical Containment

Data Source

PatentEP4239215A1Vibration isolator for supporting a payload
Publication Date: 2023.09.06 CARL ZEISS SMT GMBH
  • EP4239215A1 patent drawingFigure 1~2
  • EP4239215A1 patent drawingFigure 3~4
  • EP4239215A1 patent drawing

AI summary

A vibration isolator (10; 210) for supporting a payload and isolating the payload from vibrations comprises a contact member (12) configured for supporting the payload, at least two pressurized gas compartments (24) arranged next to each other to support the contact member at different locations, which pressurized gas compartments are connected to each other via a tubing system (54), wherein the tubing system contains at least one restriction (66) at which a cross section of the tubing system is reduced by at least 50%.