Vibration Sensor With Elastic Sheet And Mass Piece
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Solution Overview
Problem
Existing vibration sensors have complex structures and low sensitivity due to their design, which affects their ability to effectively convert external vibration signals into electrical signals.
Innovation Solution
A vibration sensor with a simplified structure featuring a housing, an elastic sheet, a mass piece, and a MEMS chip, where the elastic sheet and mass piece are positioned to create a concave cavity with a larger cross-sectional area, enhancing vibration and pressure signal conversion, and an integrated circuit chip processes the signals for improved sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a traditional vibration sensor structure with mounting plate, through hole, and gas pressure cavity is used, then the sensor can detect vibration signals, but the structure becomes complicated and sensitivity is reduced
Solution Approach 1:
The patent merges the mounting plate and the cavity structure into an integrated elastic sheet. The elastic sheet directly forms both the mounting surface for the mass piece and the cavity structure, eliminating the need for separate mounting plates and reducing structural complexity while maintaining vibration detection functionality.
Solution Approach 2:
The patent removes the traditional through hole from the structure. Instead of having a through hole in the mounting plate, the design uses an elastic sheet that forms a closed cavity, extracting the unnecessary opening while preserving the pressure change detection mechanism.
2Reliability
If a traditional vibration sensor structure is used, then the sensor can function, but sensitivity is low due to the complex structure
Solution Approach 1:
The patent uses an elastic sheet as a flexible thin film structure that directly forms the cavity. This flexible membrane design allows for better transmission of vibration-induced pressure changes to the sensing element, improving sensitivity compared to rigid mounting plate structures.
Solution Approach 2:
The patent transitions from a planar mounting plate to a three-dimensional elastic sheet with integrated cavity formation. The elastic sheet bends and deforms in response to vibrations, creating pressure changes in the cavity, which enhances the coupling between mechanical vibration and pressure signal for improved sensitivity.
3Ease of manufacture
If multiple separate components (housing, mounting plate, elastic film, MEMS chip) are used, then the sensor can be assembled, but the overall height increases and structure becomes complex
Solution Approach 1:
The patent combines the mounting plate and cavity structure into a single elastic sheet component. This merging reduces the number of separate parts that need to be stacked vertically, thereby reducing the overall height of the sensor while maintaining assembly capability through the integration of multiple functions in one element.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves high sensitivity and reduced height with a simpler structure by effectively converting external vibrations into electrical signals through the designed cavity and mass piece configuration, improving vibration detection efficiency.
Implementation Method 1
an elastic sheet, the mass piece and the MEMS chip are received in the inner chamber; the elastic sheet is attached to the inner wall
Implementation Method 2
the MEMS chip and the mass piece vibrate up and down when the external vibration signal is transmitted to the vibration sensor through such structure, causing change of the volume of the concave cavity
Implementation Method 3
causing change of the volume of the concave cavity, and the gas pressure in the concave cavity changes accordingly
Data Source
AI summary
The present disclosure provides a vibration sensor and an audio device. The vibration sensor includes a housing having an inner wall and an inner chamber, an elastic sheet, a mass piece and a MEMS chip having a back cavity, the elastic sheet, the mass piece and the MEMS chip being arranged in the chamber. The elastic sheet is attached to the inner wall, the mass piece is mounted on one side of the elastic sheet away from the inner wall. The elastic sheet covers the concave cavity and defines a first through hole communicated with the concave cavity. The mass piece is provided with a second through hole communicated with the first through hole. And the first and the second through holes communicate with the back cavity and the concave cavity. The vibration sensor provided by the present disclosure has simple structure, small height and high sensitivity.