Vibration Isolation Table Structure With Spaced Blocks and Damping Concrete
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Solution Overview
Problem
Semiconductor equipment in manufacturing lines is susceptible to external vibrations, requiring effective vibration isolation to maintain precision, but existing solutions struggle to maintain vibration attenuation while allowing space for interfering objects.
Innovation Solution
A vibration isolation table system comprising a lower structure with spaced block structures, a middle H-beam structure, and an upper structure, all made with high attenuation concrete, which includes a polymer and concrete mixture, allowing for enhanced vibration attenuation and dynamic stiffness while accommodating interfering objects on a lattice beam.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a solid lattice beam structure is used for vibration isolation, then vibration attenuation performance is improved, but space for accommodating interfering objects is reduced
Solution Approach 1:
The lower structure is divided into multiple block structures (first block, second block, third block) spaced apart from each other, creating void spaces between them. This segmentation maintains vibration isolation performance while providing accommodation space for interfering objects such as cables and pipes within the gaps between blocks.
Solution Approach 2:
The block structures are made of high attenuation concrete comprising a polymer and concrete composite material. This composite material provides superior vibration attenuation properties compared to conventional solid concrete, enabling the spaced block configuration to achieve comparable isolation performance with reduced material volume and increased internal space.
2Reliability
If high attenuation concrete including polymer and concrete is used, then vibration attenuation and dynamic stiffness are improved, but device complexity increases
Solution Approach 1:
The concrete material's parameters are modified by incorporating polymers to create high attenuation concrete. This changes the material's damping characteristics and dynamic stiffness properties, enabling superior vibration isolation performance while maintaining structural integrity with the spaced block configuration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves a predetermined level of vibration attenuation comparable to or exceeding that of a lattice beam, while allowing space for interfering objects, thus ensuring the precision of semiconductor equipment operations.
Implementation Method 1
At least one of the lower structure and the upper structure may include high attenuation concrete including a polymer and concrete
Data Source
AI summary
A vibration isolation table of the disclosure may include a lower structure including a plurality of block structures, a middle structure on the lower structure, and an upper structure on the middle structure. The plurality of block structures may be spaced apart from one another such that a space is formed between adjacent ones of the plurality of block structures. At least one of the lower structure and the upper structure may include high attenuation concrete.