Vibration Transducer Vacuum Shell to Block Oxide Gas Permeation
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Solution Overview
Problem
Vibration transducers in existing technologies are prone to malfunction due to gas permeation through the oxide films, which lowers the vacuum degree and causes excitation defects.
Innovation Solution
A vibration transducer design that includes a polysilicon layer forming a shell and substrate contact parts to continuously surround the vacuum chamber, electrically connecting the polysilicon layer and silicon substrate, thereby discontinuing the gas permeation path and preventing gas entry.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If oxide films are used to form the vacuum chamber, then the structure is simple and manufacturing is easy, but gas permeation occurs through the oxide films causing malfunction
Solution Approach 1:
The patent uses a composite structure combining oxide film and polysilicon layer to form the vacuum chamber. The oxide film provides ease of manufacture while the polysilicon layer provides gas impermeability, thus resolving the contradiction between ease of manufacture and reliability by combining materials with complementary properties.
Solution Approach 2:
The vacuum chamber is segmented into multiple layers: oxide film layer and polysilicon layer. This segmentation allows each layer to perform its specialized function - the oxide film for structural formation and the polysilicon for gas barrier protection - thereby achieving both ease of manufacture and high reliability.
2Reliability
If polysilicon layer forms a shell structure, then gas permeation is prevented, but the device structure becomes more complex
Solution Approach 1:
The polysilicon layer serves multiple functions: it forms the shell structure of the vacuum chamber, provides gas barrier protection, and acts as an electrical connection path between the activation layer and substrate. This multi-functionality reduces the need for additional separate components, thereby limiting the increase in device complexity while achieving gas permeation prevention.
Solution Approach 2:
The patent merges the shell formation function and gas barrier function into a single polysilicon layer structure. By combining these functions in one element rather than using separate components, the device complexity is minimized while still achieving reliable gas permeation prevention.
3Reliability
If substrate contact parts continuously surround the vacuum chamber, then gas permeation path is discontinued, but manufacturing precision requirements increase
Solution Approach 1:
The substrate contact parts are strategically positioned at specific locations where the polysilicon layer makes contact with the substrate to discontinue the gas permeation path. This localized approach focuses manufacturing precision requirements only at critical contact points rather than throughout the entire structure, making high reliability achievable without excessive overall manufacturing precision demands.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively prevents malfunctions caused by gas permeation, prolongs the device's lifetime by reducing gas diffusion, and simplifies the structure by allowing potential application from the surface, reducing the risk of electrostatic discharge damage.
Implementation Method 1
a substrate contact part configured to electrically conduct the polysilicon layer and the silicon substrate
Implementation Method 2
a vibration transducer is a device configured to measure an applied physical amount by detecting a change in resonance frequency of a vibrator
Implementation Method 3
the vibrator 330 vibrates at a resonance frequency, and an electrostatic capacity between the vibrator 330 and the second electrode plate 342 changes, so that a current is output
Data Source
AI summary
A vibration transducer includes a silicon substrate, a first oxide film formed on the silicon substrate, an activation layer formed on the first oxide film, a second oxide film formed on the activation layer, a polysilicon layer formed on the second oxide film, and a substrate contact part. A vibrator, a vibrator electrode electrically conducted with the vibrator, a fixed electrode close to the vibrator and a vacuum chamber configured to surround the vibrator are formed in the activation layer. The polysilicon layer forms a shell. The substrate contact part is configured to electrically conduct the polysilicon layer and the silicon substrate, and is formed to continuously surround the vacuum chamber in a region, in which the vibrator, the vibrator electrode and the fixed electrode of the activation layer are not formed, of the activation layer.