Vibrational membrane probe for noise reduction
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Solution Overview
Problem
Traditional surface texture measurement apparatuses face challenges in accurately measuring nano-scale features due to noise from electromagnetic coils and air bearings, leading to measurement errors and distortions.
Innovation Solution
A surface texture probe with a vibrational membrane is introduced, featuring a vertical guide assembly and guide adjustment assembly to control the stylus holder's movement, combined with a vibrational membrane to absorb and dissipate noise, ensuring precise vertical movement and reducing noise interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If electromagnetic coils and air bearings are used to control stylus holder movement, then the movement control is achieved, but thermal noise and vibration noise are generated that affect measurement results
Solution Approach 1:
The patent replaces electromagnetic coils and air bearings with a pure mechanical guide structure consisting of a guide rail and guide block. This mechanical substitution eliminates the source of thermal noise and vibration noise associated with electromagnetic and pneumatic systems, while maintaining the ability to control stylus holder movement through mechanical constraint.
Solution Approach 2:
The patent extracts and removes the noisy components (electromagnetic coils and air bearings) from the system, retaining only the essential mechanical guiding function through a simplified guide rail and guide block arrangement. This extraction eliminates harmful noise while preserving the core movement control capability.
2Measurement precision
If excessive restraint is applied to control stylus movement, then measurement accuracy is improved, but the stylus responds too slowly causing distorted results
Solution Approach 1:
The patent applies different degrees of restraint to different aspects of stylus movement. The guide rail provides strong constraint in the horizontal direction to prevent rotation and lateral movement, while allowing vertical movement to be controlled by the probing force. This localized differentiation of constraints ensures measurement accuracy without excessive restraint that would slow the stylus response.
Solution Approach 2:
The patent employs a dynamic balancing approach where the guide structure provides necessary constraints while allowing appropriate movement freedom. The guide rail and guide block arrangement dynamically adapts to the probing force, maintaining measurement accuracy while enabling timely stylus response to surface features.
3Speed
If insufficient restraint is applied to stylus movement, then stylus response speed is improved, but the stylus rotates and deflects causing measurement errors
Solution Approach 1:
The patent implements selective restraint through the guide rail structure that constrains horizontal movement and rotation while permitting vertical movement. This localized constraint application prevents stylus rotation and deflection that would cause measurement errors, while maintaining sufficient freedom for timely response to surface features.
Solution Approach 2:
The guide block acts as an intermediary element between the stylus holder and the guide rail. It transmits the probing force while maintaining the geometric constraint that prevents rotation and lateral movement, thereby ensuring measurement accuracy without overly restricting the stylus's ability to respond to surface features.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces noise during measurement, improving the accuracy of surface texture analysis and preventing stylus rotation and swinging, thereby enhancing the reliability of nano-scale feature measurements.
Implementation Method 1
a vibrational membrane to absorb and dissipate noise
Data Source
AI summary
A surface texture probe and a surface texture measurement apparatus with a vibrational membrane are provided. The probe includes a housing and a vibrational membrane, a stylus holder, a vertical guide assembly, a guide adjustment assembly and a stylus. An inner end of the vibrational membrane is attached to an upper end of the stylus holder. An outer end of the vibrational membrane is fixed to a vibrational membrane connection assembly fixedly connected to the housing. The vertical guide assembly is fixed inside the housing and slidably connected to the stylus holder and configured to guide the stylus holder to move in a vertical direction. The stylus is fixed to a lower end of the stylus holder. The guide adjustment assembly is mounted on the vertical guide assembly and configured to adjust a sliding friction force between the vertical guide assembly and the stylus holder.