Vibrator Support Substrate Beams for Base Strain Relief
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Solution Overview
Problem
Existing vibrator devices face challenges in reducing deformation and strain on the base portion caused by vibration of the drive arms, leading to degradation of vibration characteristics.
Innovation Solution
The vibrator device incorporates a support substrate with a frame section and beams made of the same material, where the beams extend from the frame section and overlap the base portion, connected with bonding members to absorb and relieve strain during vibration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the base portion is directly attached to the element holder with bonding members, then the structure is simple, but deformation and strain on the base portion increase under vibration, degrading vibration characteristics
Solution Approach 1:
The support substrate is segmented into a frame section and multiple beam sections (first beam, second beam, etc.) that extend from the frame. This segmentation allows the structure to flex and absorb vibration-induced strain while maintaining overall support, thereby improving vibration characteristics without significantly increasing complexity.
Solution Approach 2:
The beam sections are specifically positioned to overlap with the base portion of the vibrator element, creating localized support zones. This local quality enhancement provides targeted strain relief where it is most needed during vibration, while the rest of the structure remains relatively simple.
2Reliability
If beams are added to the support substrate to reduce strain on the base portion, then vibration characteristics improve, but the device complexity increases
Solution Approach 1:
The frame section and beam sections are merged into a single integrated support substrate structure, all formed from the same material in one manufacturing process. This merging approach provides the strain-relief functionality of multiple components while avoiding the complexity of assembling separate parts, thus improving vibration characteristics without proportionally increasing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces strain on the base portion, thereby enhancing the vibration characteristics of the vibrator element and preventing degradation.
Implementation Method 1
The first beam and the second beam relieve strain on the base portion
Data Source
AI summary
Provided is a vibrator device including a support substrate and a vibrator element. The support substrate includes a frame section. The vibrator element is disposed on the support substrate and includes a base portion. The support substrate includes a first beam and a second beam. The first beam and the second beam are made of the same material as the frame section. The first beam extends from the frame section and includes a first tip in a portion where the first beam overlaps the base portion. The second beam extends from the frame section and includes a second tip in a portion where the second beam overlaps the base portion. The base portion and the first tip are connected to each other with a first bonding member disposed therebetween. The base portion and the second tip are connected to each other with a second bonding member disposed therebetween.


