Vibrator Support Substrate Buffering Against Arm Impact Damage
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Solution Overview
Problem
In vibrator devices, the close overlap between the relay substrate and the vibrator element leads to a risk of damage when the drive or detection arms are bent due to external impacts, as they may come into contact with the relay substrate, causing potential damage.
Innovation Solution
Incorporating a buffer member on the support substrate with lower hardness than the substrate itself, positioned to overlap the vibrating arms, which alleviates impact by absorbing contact and reducing damage to the arms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the relay substrate and vibrator element are provided so as to overlap each other with a small gap, then the device size is reduced, but the drive arm or detection arm is likely to come into contact with the relay substrate when bent due to external impact, causing damage
Solution Approach 1:
A buffer member is introduced as an intermediary element between the vibrator element and the relay substrate. This buffer member absorbs impact forces when the drive arm or detection arm bends due to external impact, preventing direct contact and potential damage between the arm and the relay substrate, thus resolving the contradiction between compact size and reliability
Solution Approach 2:
The buffer member is positioned in advance at the location where the drive arm or detection arm might contact the relay substrate during impact events. By pre-placing this cushioning element, the system prepares for potential impact damage before it occurs, allowing the arms to bend without risking damage to critical components
Data Source
AI summary
A vibrator device includes: a vibrator element that includes a vibrator substrate including a vibrating arm, and an electrode arranged in the vibrator substrate; a base; a support substrate that includes a base mount fixed to the base, an element support that supports the vibrator element, and a beam that connects between the base mount and the element support, and supports the vibrator element relative to the base; a wiring pattern that is arranged in the support substrate, and is electrically connected to the vibrator element; and a buffer member that is arranged on the wiring pattern of the support substrate, and whose hardness is lower than that of the support substrate. Also the buffer member is arranged on a face of the support substrate, that opposes the vibrator element, and overlaps the vibrating arm in a plan view of the support substrate.