Vibrator Element Electrode Segmentation for Noise Reduction

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Solution Overview

Problem

Existing angular velocity detection vibrator elements face challenges in accurately detecting angular velocities about the Z-axis and Y-axis due to noise interference from capacitive coupling, leading to reduced detection sensitivity.

Innovation Solution

A physical quantity detection vibrator element is designed with a detection arm made of piezoelectric material, featuring specific electrode configurations and arrangements that reduce noise in detection signals, allowing for improved sensitivity and independent detection of angular velocities by optimizing the phase relationships between drive and detection vibrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If noise cancellation is performed by subtracting detection signals (Sa-Sb) for Z-axis angular velocity detection, then noise is reduced, but detection sensitivity deteriorates

Engineering Contradiction:
ImprovenoiseVSAvoiddetection sensitivity
Core Design Contradiction:
Object-affected harmful factorsVSMeasurement precision

Solution Approach 1:

The detection arm is divided into multiple electrode portions (first electrode portion, second electrode portion, third electrode portion, fourth electrode portion) with corresponding reference potential electrodes. Each portion generates separate detection signals that are processed differently: some signals are subtracted for noise cancellation while others are added for sensitivity enhancement, allowing simultaneous noise reduction and sensitivity maintenance through segmented signal processing

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a multi-dimensional signal processing approach by creating four distinct detection signals from four electrode portions and processing them through different mathematical operations (addition and subtraction combinations). This multi-dimensional processing allows the system to simultaneously achieve noise cancellation in one dimension while preserving sensitivity in another dimension

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If detection signals are added (Sa+Sb) for Y-axis angular velocity detection, then detection sensitivity is improved, but noise is amplified

Engineering Contradiction:
Improvedetection sensitivityVSAvoidnoise
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

By segmenting the detection arm into four electrode portions with corresponding reference electrodes, the system can generate four separate detection signals. This segmentation enables selective processing where addition operations enhance sensitivity for Y-axis detection while subtraction operations cancel noise for Z-axis detection, resolving the contradiction through differentiated signal processing paths

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes the processing parameters (addition vs. subtraction) based on the detection axis requirement. For Y-axis detection, addition is used to enhance sensitivity; for Z-axis detection, subtraction is used to cancel noise. This parameter change approach allows the system to optimize for different detection needs without compromising overall performance

Inventive Principle:
Principle #35Parameter changes

3Object-affected harmful factors

If multiple detection electrodes are added to reduce noise through signal processing, then noise cancellation capability is improved, but device complexity increases

Engineering Contradiction:
ImprovenoiseVSAvoidelectrode configuration
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The detection arm structure serves multiple functions simultaneously: it provides mechanical support for vibration, hosts four detection electrodes for signal generation, and enables both noise cancellation and sensitivity enhancement through its electrode configuration. This multi-functionality reduces the need for separate noise cancellation components, thereby limiting the increase in device complexity while achieving improved noise rejection

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces noise in detection signals, enhancing the sensitivity and accuracy of angular velocity detection for both Z-axis and Y-axis measurements, enabling better physical quantity detection sensitivity.

Implementation Method 1

a detection arm that includes a piezoelectric material, performs a drive vibration in a first direction, and performs a detection vibration in second direction orthogonal to the first direction

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS10072928B2Physical quantity detection vibrator element, physical quantity detection apparatus, electronic apparatus, and moving object
Publication Date: 2018.09.11 SEIKO EPSON CORP
  • US10072928B2 patent drawing
  • US10072928B2 patent drawing
  • US10072928B2 patent drawing

AI summary

A vibrator element has a detection arm that performs a drive vibration in a Z-axis direction, and performs a detection vibration in an X-axis direction when an angular velocity is applied thereto The vibrator element also has first, second, third, and fourth electrode portions and first, second, third, and fourth ground electrode portions provided on a detection arm. Further, a signal generated between the first electrode portion and the first ground electrode portion and a signal generated between the second electrode portion and the second ground electrode portion are in opposite phase in a drive vibration and in phase in a detection vibration. Furthermore, a signal generated between the third electrode portion and the third ground electrode portion and a signal generated between the fourth electrode portion and the fourth ground electrode portion are in opposite phase in the drive vibration and in phase in the detection vibration.