Vibrator Element Frequency Adjustment via Laser Ablation
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Solution Overview
Problem
The existing frequency adjustment method for vibrator elements, where weights are disposed on both surfaces of vibrating arms, leads to splash adherence on the package, causing short circuits and parasitic capacitance, and results in vibration leakage due to centroid deviation and mass imbalance.
Innovation Solution
A frequency adjustment method where a first weight is placed on one surface and a second weight on the other surface of the vibrating arm, with a non-overlapping region, and the first weight is irradiated with an energy ray to adjust the resonance frequency, maintaining mass balance and suppressing vibration leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If weights are disposed on both surfaces of the vibrating arm for frequency adjustment, then the resonance frequency can be adjusted, but splash evaporated from the lower surface weight adheres to the package bottom surface, causing short circuits and parasitic capacitance
Solution Approach 1:
The patent extracts the harmful function of the lower surface weight by removing it, keeping only the upper surface weight for frequency adjustment. This eliminates the source of splash that causes short circuits and parasitic capacitance while maintaining the frequency adjustment capability through the upper surface weight alone.
Solution Approach 2:
Instead of placing weights on both surfaces as in conventional design, the patent inverts the approach by placing the weight only on the upper surface, which is the opposite of the conventional lower surface placement. This inversion prevents splash from adhering to the package bottom surface.
2Manufacturing precision
If weights are placed on both surfaces of the vibrating arm, then frequency adjustment is achieved, but the centroid deviates from the center, causing out-of-plane vibration and increased vibration leakage
Solution Approach 1:
The patent removes the lower surface weight that causes centroid deviation and out-of-plane vibration. By keeping only the upper surface weight, the design eliminates the source of vibration leakage while maintaining frequency adjustment capability through careful positioning and sizing of the upper surface weight.
3Manufacturing precision
If laser light is irradiated at the weight on the lower surface for frequency adjustment, then the drive frequency can be adjusted, but the splash causes short circuits between wires and generates parasitic capacitance
Solution Approach 1:
The patent extracts and removes the lower surface weight that generates harmful splash during laser irradiation. Frequency adjustment is performed by irradiating only the upper surface weight, eliminating the source of short circuits and parasitic capacitance while maintaining the drive frequency adjustment function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the likelihood of splash adherence, maintains mass balance, and effectively suppresses vibration leakage, ensuring reliable electrical and vibration characteristics.
Implementation Method 1
irradiating the non-overlapping region of the first weight with an energy ray from one principal surface side, removing a portion of the non-overlapping region of the first weight, and adjusting a resonance frequency of the vibrating arm
Data Source
AI summary
A frequency adjustment method of a vibrator element includes preparing a vibrator element that has a vibrating arm, a first weight placed on one principal surface of the vibrating arm, and a second weight placed on the other principal surface of the vibrating arm, in which the first weight has a non-overlapping region which does not overlap the second weight in a plan view in a normal direction of the principal surface, preparing a substrate including a wiring portion, and fixing the vibrator element to the substrate by causing the other principal surface side of the vibrator element to face the substrate side, and irradiating the non-overlapping region of the first weight with an energy ray from one principal surface side, removing a portion of the non-overlapping region of the first weight, and adjusting a resonance frequency of the vibrating arm.


