Curved Linkage Structure in Vibrator Elements for Shock Resistance

The patent applies curvature to the linkage section by forming a curved surface at the inner right-angled portion where stress concentrates. This curved surface design redistributes the stress field, preventing stress concentration that would lead to cracking. The curved geometry transforms the sharp angular stress concentration into a distributed stress pattern across the curved surface, thereby improving shock resistance while maintaining the shifted linkage configuration for vibration performance.

The patent applies local quality by modifying only the specific inner right-angled portion of the linkage section where stress concentrates, rather than changing the entire linkage geometry. The curved surface is formed locally at the stress concentration point, while the rest of the linkage section maintains its original right-angled configuration for ease of manufacture. This localized modification balances manufacturing simplicity with crack resistance.

The patent merges the curved surface formation process with the existing etching工艺流程 by using the same protective film pattern formation step to define both the vibrator element outline and the curved surface location. The curved surface is created during the etching process itself rather than as a separate post-processing step, thereby achieving stress dispersion through curvature while minimizing additional manufacturing complexity.