Vibrator Element Pad Reinforcement for Stress and Impact Resistance
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Solution Overview
Problem
Existing vibrator elements with thinner support portions are prone to deformation under external impacts, leading to deteriorated vibration characteristics and reliability of electrical connections.
Innovation Solution
A vibrator element design featuring a plate-shaped vibrating substrate with a support portion thinner than the vibrating portion, reinforced with metal films on pad electrodes, and a hermetically sealed package to reduce stress and enhance mechanical strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the support portion is made thinner to reduce stress on the vibrating portion, then the vibration characteristics are improved, but the mechanical strength and impact resistance are deteriorated
Solution Approach 1:
The support portion is designed with non-uniform thickness, being thinner at the center and thicker at the edges. This local variation in thickness allows the center to flex and absorb stress while the thicker edges provide enhanced mechanical strength and resistance to external impacts, thus resolving the contradiction between vibration characteristics and mechanical strength.
Solution Approach 2:
The vibrator element incorporates multiple materials with different properties: the piezoelectric substrate provides vibration functionality, while the metal cap and adhesive layer form a composite structure that reinforces the support portion. This composite design enhances overall mechanical strength without compromising the vibration characteristics of the thinner central region.
2Stability of the object's composition
If the support portion is made thinner to reduce stress, then stress relaxation is improved, but the reliability of electrical connection is deteriorated
Solution Approach 1:
The support portion's non-uniform thickness design creates a stress distribution pattern where the thinner center relaxes stress while the thicker edges maintain structural integrity. The electrode and adhesive are strategically positioned to leverage this stress distribution, ensuring reliable electrical connections are maintained at the edges where mechanical strength is highest.
Solution Approach 2:
The invention addresses the electrical connection reliability issue by extending the support structure in the vertical dimension through the metal cap and adhesive layer. This three-dimensional reinforcement provides additional pathways for electrical connection that are not affected by the reduced thickness of the support portion's main body.
3Reliability
If the metal film thickness is increased to enhance electrical connection, then electrical conductivity is improved, but the manufacturing complexity and material usage are increased
Solution Approach 1:
Instead of uniformly increasing metal film thickness across the entire electrode structure, the invention selectively applies thicker metal layers only at critical locations where electrical connection reliability is most needed, such as at the edges of the support portion and at interface regions. This parameter optimization achieves reliable electrical connections while minimizing material usage and manufacturing complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively absorbs and relaxes stress, maintaining excellent vibration characteristics and impact resistance while ensuring reliable electrical connections.
Implementation Method 1
the vibrator element effectively absorbs and relaxes stress, maintaining excellent vibration characteristics and impact resistance
Data Source
AI summary
A vibrator element includes: a plate-shaped vibrating substrate including a first surface and a second surface, which are in a front and back relationship, and including a vibrating portion and a support portion that supports the vibrating portion and has a thickness smaller than that of the vibrating portion; an electrode including a first excitation electrode disposed at the first surface at the vibrating portion, a second excitation electrode disposed at the second surface at the vibrating portion, a first pad electrode disposed at the support portion and electrically coupled to the first excitation electrode, and a second pad electrode disposed at the support portion and electrically coupled to the second excitation electrode; a first metal film disposed at an upper layer on the first pad electrode and having a thickness larger than that of the first pad electrode; and a second metal film disposed at an upper layer on the second pad electrode and having a thickness larger than that of the second pad electrode.