Vibrator Element Sidewall Geometry for Burr-Free Laser Frequency Trimming

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Solution Overview

Problem

The existing frequency adjustment method for quartz crystal vibrators is prone to forming foreign particles like burrs due to laser deflection or blockage, leading to frequency variations during and after the manufacturing process.

Innovation Solution

The vibrator element design includes side surfaces tilted with respect to the Z-axis, with first weights arranged such that their outer edges align with the innermost parts of these surfaces, allowing laser irradiation without refraction or blockage, thereby preventing burr formation and ensuring consistent frequency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the incident angle of the laser is made acute from the second side surface toward the first side surface to remove the frequency adjusting metal film, then the frequency adjusting metal film can be removed, but the laser is deflected or blocked by the second side surface causing incomplete removal and foreign particle formation

Engineering Contradiction:
Improvefrequency adjusting metal film removal completenessVSAvoidlaser deflection and blockage
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent inverts the laser irradiation approach by making the second side surface transparent to the laser beam and irradiating from the first side surface side instead of irradiating from the second side surface. This reversal allows the laser to reach the frequency adjusting metal film without being deflected or blocked by the second side surface, thereby preventing foreign particle formation while achieving complete metal film removal.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent introduces the first side surface as an intermediary that allows laser transmission. By making the first side surface transparent to the laser beam and positioning it between the laser source and the frequency adjusting metal film, the laser can effectively reach and remove the metal film without interference from the second side surface, solving the deflection and blockage problems.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If the laser is made to enter from the second side surface to remove the frequency adjusting metal film, then the metal film can be removed, but foreign particles such as burrs may form and cause frequency variation

Engineering Contradiction:
Improvefrequency adjustment efficiencyVSAvoidfrequency stability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent inverts the irradiation direction by making the second side surface transparent and irradiating from the first side surface. This inversion eliminates the formation of foreign particles such as burrs during metal film removal, thereby maintaining frequency stability while preserving frequency adjustment efficiency.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent changes the transparency parameter of the first side surface to be transparent to the laser beam. This parameter change allows the laser to pass through the first side surface and effectively remove the frequency adjusting metal film from the first side surface side, preventing foreign particle formation and ensuring frequency stability during the adjustment process.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If the frequency adjusting metal film is removed from the second side surface side, then the metal film can be removed, but the laser cannot sufficiently irradiate the metal film at the second side surface side due to deflection

Engineering Contradiction:
Improvemetal film removal completenessVSAvoidlaser irradiation intensity
Core Design Contradiction:
Manufacturing precisionVSIllumination intensity

Solution Approach 1:

The patent inverts the irradiation approach by making the first side surface transparent and irradiating from the first side surface side. This inversion ensures that the laser beam can directly reach and sufficiently irradiate the frequency adjusting metal film without being deflected by the second side surface, thereby achieving complete and precise metal film removal with adequate laser intensity.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent uses the first side surface as a transparent intermediary that allows laser transmission. By positioning the first side surface between the laser source and the frequency adjusting metal film, the laser can effectively penetrate through the first side surface and irradiate the metal film with sufficient intensity, ensuring complete removal without deflection losses.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design effectively prevents frequency variations by ensuring complete laser irradiation of the weights, reducing the occurrence of foreign particles and maintaining frequency stability.

Implementation Method 1

irradiating at least a part of the first weight with a laser beam from the first surface side in a direction along the Z axis to remove the at least a part of the first weight

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS12620971B2Vibrator element, vibrator device, and method of manufacturing vibrator element
Publication Date: 2026.05.05 SEIKO EPSON CORP
  • US12620971B2 patent drawing
  • US12620971B2 patent drawing
  • US12620971B2 patent drawing

AI summary

A vibrating arm of a vibrator element has a first surface, a second surface at an opposite side to the first surface in a Z direction, a first side surface and a second side surface as side surfaces, and a third side surface as a tip surface. At least one of the first side surface, the second side surface, and the third side surface includes a first side surface part tilted with respect to a Z direction, and a second side surface part tilted toward the first surface or the second surface with respect to the first side surface part. The first weight is arranged so that an outer edge of the first weight is located at inner side of innermost parts in the first side surface part and the second side surface part, or at the same position as the innermost parts when viewed from the Z direction.