Vibrator Support Substrate Recesses to Protect Vibrating Arms
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Solution Overview
Problem
The existing vibrator devices face issues with the vibrating arms making contact with the support substrate due to external impacts, leading to potential damage and degradation of the vibration characteristics.
Innovation Solution
The vibrator device incorporates a support substrate with recessed parts corresponding to the vibrating arms, which overlap with the arms in a plan view, preventing contact and enhancing the device's ability to absorb stress, thereby protecting the vibrating arms from damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the gap between the support substrate and the vibrator element is made small, then the device size is reduced, but the vibrating arms are prone to contact with the support substrate causing damage
Solution Approach 1:
The patent introduces recessed parts on the support substrate that correspond to the positions of the vibrating arms. These recesses create additional vertical space (third dimension) allowing the vibrating arms to displace downward without contacting the support substrate, thus resolving the contradiction between small device size and reliable vibration operation.
2Measurement precision
If the tip portion of the vibrating arm is allowed to have large displacement, then the vibration sensitivity is improved, but the contact with the support substrate becomes more likely
Solution Approach 1:
The recessed parts provide additional vertical clearance that allows the tip portions of the vibrating arms to achieve large displacement amplitudes during vibration without risking contact with the support substrate. This enables high vibration sensitivity while preventing contact damage.
Solution Approach 2:
The recessed parts act as pre-configured protective spaces that cushion the vibrating arms during large amplitude motion. By providing this protective geometry in advance, the design allows full vibration range without contact damage.
Data Source
AI summary
A vibrator device includes a vibrator element having a base part, and a detection arm and a drive arm as a plurality of vibrating arms extending in a B direction as a first direction from the base part, a base body, and a support substrate configured to support the vibrator element with respect to the base body, wherein the support substrate includes a base-body fixation part to be fixed to the base body, an element support part configured to support the base part of the vibrator element, and a beam part configured to couple the base-body fixation part and the element support part to each other, and the support substrate has a plurality of recessed parts corresponding to the plurality of vibrating arms in an area which is located at a side of a surface opposed to the vibrator element, and on which at least a part of the vibrating arms overlaps in a plan view.