Vibrator Support Substrate Layout for Low-Noise Signal Detection
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Solution Overview
Problem
Existing vibrator devices suffer from noise interference between drive signal and detection signal interconnections, leading to deteriorated detection accuracy due to their close proximity on the same beam part.
Innovation Solution
The vibrator device incorporates a support substrate with a gimbal structure and interconnections that separate drive signal and detection signal interconnections through distinct inner and outer beams, ensuring they are laid around the element mounting base and supporting base through different beams, maintaining a sufficient distance to prevent noise interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If drive signal interconnection and detection signal interconnection are disposed close to each other on one beam part, then device complexity is reduced, but noise interference occurs and detection accuracy deteriorates
Solution Approach 1:
The support substrate is divided into distinct regions with separate beam parts: inner beams for coupling element mounting base to frame, and outer beams for coupling frame to supporting base. Drive signal and detection signal interconnections are routed through different beam parts, physically segmenting the signal paths to eliminate noise interference while maintaining a compact overall structure.
Solution Approach 2:
The frame acts as an intermediary structure between the element mounting base and supporting base. By routing drive and detection signal interconnections through different beam parts that connect to the frame, the frame mediates the physical separation of signal paths, preventing direct coupling between drive and detection signals while maintaining electrical connectivity.
2Measurement precision
If drive signal interconnection and detection signal interconnection are separated through different beam parts, then noise interference is prevented and detection accuracy is improved, but device complexity increases
Solution Approach 1:
The support substrate with its gimbal structure serves multiple functions simultaneously: it provides mechanical support for the vibrator element, establishes electrical connections through interconnections, and physically separates drive and detection signal paths. The frame and beam parts serve both structural coupling functions and signal routing functions, reducing the need for additional dedicated separation structures.
Solution Approach 2:
The inner beams are nested within the overall support substrate structure, connecting the element mounting base to the frame. The outer beams are nested outside, connecting the frame to the supporting base. This nested arrangement allows compact integration of multiple signal paths and structural elements without increasing the overall device footprint, managing complexity through hierarchical organization.
Data Source
AI summary
A vibrator device has the vibrator element, a support substrate supporting the vibrator element, and a plurality of interconnections disposed on the support substrate. The support substrate includes an element mounting base, a supporting base, a frame located between the element mounting base and the supporting base, inner beams for coupling the element mounting base and the frame to each other, and outer beams for coupling the frame and the supporting base to each other. The plurality of interconnections include a drive signal interconnection and a detection signal interconnection laid around to the element mounting base and the supporting base, and the drive signal interconnection and the detection signal interconnection are laid around to the element mounting base and the frame through the respective inner beams different from each other, and are laid around to the frame and the supporting base through the respective outer beams different from each other.