Video Overlay for Semiconductor Failure Analysis
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Solution Overview
Problem
Current failure analysis techniques for integrated circuit chips require tedious manual alignment and image processing of numerous time-resolved images generated by the LADA technique, hindering efficient identification of failing devices in dense chip layouts.
Innovation Solution
A video overlay system and process that allows users to load and align multiple images generated by the LADA technique, enabling playback and navigation like a video, with hotspot marking and analysis to identify critical areas and potential killer nets.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual alignment and image processing of numerous time-resolved images is performed, then identification accuracy of failing devices can be achieved, but analysis time and operational complexity increase significantly
Solution Approach 1:
The system performs preliminary alignment by applying a single alignment matrix to all images in the sequence based on alignment data from one reference image. This preliminary automated alignment eliminates the need for manual alignment of each individual image, significantly reducing analysis time while maintaining identification accuracy through subsequent hotspot analysis.
Solution Approach 2:
The system creates a video overlay by copying and stacking multiple time-resolved images in sequence, allowing operators to view the complete set of images as a continuous video. This copying approach enables rapid visualization of device behavior across time intervals without requiring manual processing of each individual image.
2Manufacturing precision
If manual alignment of each image is performed, then precise positioning can be achieved, but operational efficiency decreases
Solution Approach 1:
The system applies a universal alignment matrix to all images in the time-resolved sequence, making the alignment process multi-functional across the entire image set. This single alignment operation positions all images precisely relative to each other, maintaining positioning precision while dramatically improving operational efficiency by eliminating repetitive manual alignment tasks.
Solution Approach 2:
The system enables self-service alignment by automatically applying the alignment matrix to all images based on data from one reference image. This self-service approach maintains precise positioning without requiring continuous manual intervention, thereby improving operational efficiency while preserving positioning accuracy.
3Loss of information
If 100+ images are viewed at various time intervals, then comprehensive analysis can be performed, but user workload and complexity increase
Solution Approach 1:
The system merges 100+ time-resolved images into a single video overlay display, combining all images into one unified visual interface. This merging approach enables comprehensive analysis of device behavior across all time intervals while reducing user workload by eliminating the need to manually navigate and switch between individual images.
Solution Approach 2:
The system adds the time dimension to the spatial display by stacking images in temporal sequence within the video overlay. This dimensional transformation allows comprehensive time-based analysis of failing devices while simplifying user interaction, as operators can observe temporal evolution directly in the overlay without complex navigation through multiple separate images.
Data Source
AI summary
A method includes automatically aligning a laser-based timing analysis image of a semiconductor device with an image of a layout of the device. The method further includes controlling a speed at which a multitude of images subsequently obtained by the laser-based timing analysis are compared to the layout of the device to create a video overlay. The method further includes analyzing a multitude of potential failures of the semiconductor device by detecting movements of a multitude of hotspots on the layout as shown by the video overlay.