Virtual Image Inspection for Semiconductor Patterning Reliability

The patent applies preliminary action by generating virtual images of measurement targets before actual fabrication processes. The virtual image generator creates preprocessed images and captured images of patterned layers in advance, allowing inspection measurements to be performed virtually before physical manufacturing steps. This eliminates the need for time-consuming physical inspections at various fabrication stages while maintaining measurement reliability through accurate virtual representation of the measurement targets.

The patent applies copying by creating virtual copies of measurement targets instead of performing physical inspections. The virtual image generator produces digital representations (virtual images) of patterned layers and measurement targets, which can be inspected multiple times without additional physical resources. This copying approach replaces expensive physical inspection equipment and processes with computational methods, significantly reducing fabrication costs while maintaining measurement reliability through accurate digital modeling.

The patent applies universality by creating a single virtual image generation system that serves multiple inspection purposes. The virtual image generator can produce images for after-development inspection, after-cleaning inspection, and various intermediate process measurements by simply changing the input layer configurations. This multi-functional virtual inspection system replaces multiple separate physical inspection devices and processes, reducing overall system complexity while maintaining high measurement precision across different inspection stages.