Virtual Inspector for Semiconductor Wafer Data Analysis
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Solution Overview
Problem
Current wafer inspection systems face challenges in processing and storing large amounts of data due to limitations in data acquisition rates and computational processing, leading to the use of simple algorithms that compromise inspection efficiency and throughput.
Innovation Solution
A system and method that integrate actual and virtual processes to perform inspection and analysis, allowing for the storage and reuse of data from multiple sources, including live, recorded, and simulated image data, enabling persistent data storage and reducing human error and variability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If complex defect detection algorithms are used, then inspection accuracy is improved, but data processing speed decreases below data acquisition rate
Solution Approach 1:
The patent applies preliminary action by performing defect detection algorithms on previously acquired wafer data before the wafer physically enters the inspection system. The virtual inspection system processes historical data sets in advance, creating defect maps and analysis results that are then available for immediate comparison when the actual wafer is inspected, thereby enabling complex analysis without slowing down real-time throughput
Solution Approach 2:
The patent uses copying by creating virtual copies of wafer data sets that can be processed independently of the physical wafer. Multiple virtual inspection systems can simultaneously analyze replicated data sets using different algorithms and parameters, eliminating the need to slow down the actual data acquisition process while still performing comprehensive complex analysis
2Adaptability or versatility
If data is stored for persistent analysis, then inspection flexibility is improved, but storage cost and complexity increase
Solution Approach 1:
The patent extracts only the essential wafer data sets needed for virtual inspection purposes and stores them in a manageable database structure. By selectively extracting and storing only relevant historical data rather than all possible inspection data, the system achieves persistent analysis capability while controlling storage complexity and costs
Solution Approach 2:
The patent creates a universal virtual inspection system that can perform multiple inspection functions using the same stored data sets. The virtual system can simultaneously execute different defect detection algorithms, parameter analyses, and comparison operations on the same historical data, providing inspection flexibility without requiring separate storage systems for each function
3Productivity
If multiple processors are used to distribute computation, then data processing capacity is improved, but system complexity and data partitioning overhead increase
Solution Approach 1:
The patent segments the virtual inspection system into multiple independent processor nodes that can simultaneously process different data sets or different aspects of the same data set. Each processor handles specific computational tasks independently, and results are aggregated to form the complete inspection analysis, thereby scaling processing capacity while maintaining manageable system complexity through modular architecture
Data Source
AI summary
Generalized virtual inspectors are provided. One system includes two or more actual systems configured to perform one or more processes on specimen(s) while the specimen(s) are disposed within the actual systems. The system also includes one or more virtual systems coupled to the actual systems to thereby receive output generated by the actual systems and to send information to the actual systems. The virtual system(s) are configured to perform one or more functions using at least some of the output received from the actual systems. The virtual system(s) are not capable of having the specimen(s) disposed therein.