Virtual Manipulator for Microlithographic Projection Objective Control
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Solution Overview
Problem
Current projection exposure apparatuses face challenges in achieving fast real-time control of manipulators to effectively correct image errors, leading to reduced throughput and potential flaws in microstructured components due to the complexity of controlling multiple manipulators with varying degrees of freedom and response times.
Innovation Solution
The introduction of a virtual manipulator that produces preliminary control signals for real manipulators, allowing for the determination of final control signals to correct image errors by combining slow, accurate algorithms with fast real-time control, thereby increasing the degree of freedom and improving correction efficiency without compromising real-time operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple real manipulators are used to correct image errors, then the correction capability is improved, but the control complexity and response time management deteriorate
Solution Approach 1:
A virtual manipulator is introduced as an intermediary between the control system and multiple real manipulators. The virtual manipulator receives control signals and distributes them to appropriate real manipulators based on their specific functions and current states, simplifying the overall control architecture while maintaining precise image error correction capability across multiple manipulators
2Manufacturing precision
If slow accurate algorithms are used for manipulator control, then the correction precision is improved, but the real-time control capability deteriorates
Solution Approach 1:
Control signals for the virtual manipulator are pre-calculated using slow but accurate algorithms during periods when high-speed control is not critical. These pre-calculated signals are then applied in real-time without requiring complex on-the-fly computations, thus achieving both high precision and real-time responsiveness in manipulator control
3Adaptability or versatility
If the degree of freedom of manipulators is increased, then the correction flexibility is improved, but the control difficulty and response time variability worsen
Solution Approach 1:
The virtual manipulator is designed with multi-functionality to handle various types of image errors and coordinate multiple real manipulators with different degrees of freedom. It universally manages diverse manipulator types through a unified control interface, maintaining correction flexibility while simplifying operational complexity through standardized control mechanisms
Data Source
AI summary
A method of operating a microlithographic projection exposure apparatus includes, in a first step, providing a projection objective that includes a plurality of real manipulators. In a second step, a virtual manipulator is defined that is configured to produce preliminary control signals for at least two of the real manipulators. In a third step, performed during operation of the apparatus, a real image error of the projection objective is determined. In a fourth step, a desired corrective effect is determined. In a fifth step, first virtual control signals for the virtual manipulator are determined. In a sixth step, second virtual control signals for the real manipulators are determined.