Virtual Substrate Processing Simulation for Faster Recipe Validation
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Solution Overview
Problem
Existing substrate processing apparatuses require extensive time and resources to edit recipes and check processing results, leading to inefficiencies due to exclusive use for such operations.
Innovation Solution
A simulator apparatus that includes a virtual apparatus memory, controller, and display manipulator to simulate substrate processing operations, allowing for recipe editing and simulation without using the actual apparatus, with options for execution speed and transfer mode selection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If substrate processing apparatus is used for recipe editing and checking, then processing operation can be validated, but apparatus is occupied exclusively and time is wasted
Solution Approach 1:
The patent creates a simulator that replicates the substrate processing apparatus's functionality, allowing recipe editing and validation to be performed on the simulation system rather than the actual apparatus. This copying approach enables independent testing without occupying the real apparatus, resolving the contradiction between validation reliability and apparatus availability
Solution Approach 2:
The simulator acts as an intermediary system between the recipe developer and the actual substrate processing apparatus. It provides a intermediate validation environment where recipes can be tested and checked before being executed on the real apparatus, eliminating the need to occupy the apparatus for validation purposes
2Measurement precision
If recipe is repeatedly modified and checked using substrate processing apparatus, then processing result can be verified, but time is wasted
Solution Approach 1:
By creating a functional copy of the substrate processing apparatus in the form of a simulator, the system enables rapid iteration and validation of recipes without time-consuming setup and execution on the actual apparatus. The simulation environment allows for quick modification and verification cycles
Solution Approach 2:
The simulator enables preliminary validation of recipes before they are executed on the actual substrate processing apparatus. By performing preliminary checks and modifications in the simulation environment, potential issues are identified and resolved in advance, reducing the need for repeated adjustments on the real apparatus
Data Source
AI summary
It is possible to reduce a time for editing a recipe by simulating a processing operation for a substrate based on an edited recipe without using a substrate processing apparatus. There is provided a technique that includes: a virtual apparatus memory storing a recipe and an apparatus control program, wherein the recipe includes steps defining process conditions and a process time, and the apparatus control program controls substrate processing; a start-up operator selecting an execution speed of the apparatus control program and a transfer operation mode of a substrate transfer structure selected from a normal transfer operation and a transfer skip operation; a virtual controller capable of starting the apparatus control program based on the execution speed and the transfer operation mode and controlling a virtual processing of the substrate based on the recipe stored in the virtual apparatus memory.