Virtual Reference Point for Dense Pad Positioning
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Solution Overview
Problem
In densely packed pad arrangements on substrates, it becomes challenging to secure space for positioning marks, making conventional mark-based positioning methods ineffective.
Innovation Solution
An image processing apparatus and method that extract a substantially rectangular pad region, set imaginary straight lines parallel to the pad region sides, and determine the intersection as a reference point for positioning, allowing accurate alignment without relying on physical marks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If pad arrangement is made highly dense, then productivity and substrate utilization are improved, but the ability to secure space for positioning marks deteriorates
Solution Approach 1:
The invention introduces an intermediary virtual reference point that is not a physical mark on the substrate but is generated through image processing of the pad arrangement itself. This virtual reference point mediates between the dense pad structure and the positioning requirement, allowing accurate positioning without occupying physical space that would interfere with pad density.
Solution Approach 2:
The invention replaces the mechanical/mark-based positioning system with an image processing-based virtual reference point system. Instead of using physical positioning marks that occupy space on the substrate, the system captures images of the pad arrangement and computationally generates reference points, substituting physical marking with optical and computational methods.
2Measurement precision
If positioning marks are provided on substrates, then positioning accuracy is improved, but the available area for pad arrangement deteriorates
Solution Approach 1:
The invention creates a virtual copy of the pad arrangement structure itself as the reference framework. Instead of adding separate positioning marks, the system processes the image of the existing pad arrangement to generate reference points that are computational copies of the pad positions, thereby maintaining 100% of the substrate area for functional purposes.
Solution Approach 2:
The pad arrangement serves dual functions: it performs its primary electrical/functional role while simultaneously serving as the reference framework for positioning. The same pad structures that provide electrical connectivity are also used to generate the virtual reference points, eliminating the need for separate positioning marks and maximizing substrate utilization.
3Reliability
If conventional mark-based positioning is used, then positioning reference is clearly defined, but device complexity increases due to mark provision requirements
Solution Approach 1:
The pad arrangement is self-sufficient and serves its own positioning function. The same pad structures that provide electrical functionality automatically provide the reference information needed for positioning through image processing, eliminating the need for separate positioning mark provision systems and reducing overall device complexity.
Data Source
AI summary
An image processing unit including: a pad region extraction unit that executes pad region extraction processing of extracting a substantially rectangular pad region surrounding a plurality of pads from an image of an inspection target object; an imaginary straight line setting unit that executes imaginary straight line setting processing of setting an imaginary first straight line parallel to a side extending in an X direction of the pad region and setting an imaginary second straight line parallel to a side extending in a Y direction of the pad; and a reference point setting unit that executes reference point setting processing of setting an intersection between the first straight line and the second straight line as the reference point.