Virtual Equipment Scheduling for Adaptive Semiconductor Transfer Logic
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Solution Overview
Problem
Existing semiconductor equipment requires manual reconfiguration of transfer logic when job environments or hardware changes, leading to inefficiencies and downtime.
Innovation Solution
A method and apparatus for equipment schedule control using a virtual simulation model to optimize operation sequences through real-time monitoring and reconstruction, allowing automatic adjustment to changing environments without manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If fixed transfer logic is used for equipment operation, then initial setup is simple, but the equipment cannot adapt to changing job or hardware environments without manual reconfiguration and downtime
Solution Approach 1:
The patent implements dynamic transfer logic that automatically adapts to changing environments by monitoring equipment status and job requirements in real-time. The system dynamically generates and updates transfer sequences without manual intervention, allowing the equipment to respond flexibly to hardware changes, job environment variations, and runtime conditions while maintaining continuous operation
Solution Approach 2:
The system performs self-configuration by automatically detecting environmental changes and adjusting transfer logic independently. The control device monitors equipment status, generates appropriate transfer sequences, and applies corrections without operator involvement, enabling the equipment to service itself during operation and eliminate downtime associated with manual reconfiguration
2Reliability
If manual calculation and re-application of transfer logic is performed, then accuracy can be ensured, but operational efficiency decreases due to operator intervention requirements
Solution Approach 1:
The system continuously monitors equipment operation status, job requirements, and environmental conditions, using this feedback to automatically generate and adjust transfer sequences. The control device compares actual operation with optimal sequences and dynamically corrects deviations, ensuring both high accuracy through continuous validation and high productivity through automated real-time optimization without manual intervention
Solution Approach 2:
The patent replaces manual operator calculation and configuration activities with automated computational systems. The control device uses algorithms to generate, validate, and apply transfer logic automatically, substituting human cognitive processes with machine-based computation that achieves equivalent or superior accuracy while dramatically improving operational efficiency by eliminating manual intervention
Data Source
AI summary
Disclosed is an equipment schedule control method and apparatus capable of operating equipment according to an optimal schedule in various environments by virtually simulating operation of the equipment, the method including (a) receiving parameter information related to operation of the equipment from an equipment terminal or an operator terminal, (b) generating primary simulation model information to which operation of current equipment is reflected, by using the parameter information, (c) reconstructing virtually operable secondary simulation model information by using the primary simulation model information, (d) calculating and comparing primary scheduling result information of the primary simulation model information and secondary scheduling result information of the secondary simulation model information, and (e) transmitting optimal equipment control information to the equipment terminal or the operator terminal to control the equipment to follow the secondary simulation model information, when the secondary scheduling result information is superior to the primary scheduling result information.