Virtual Sensor for Liquid Raw Material Monitoring

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Solution Overview

Problem

Existing gas supply devices for substrate processing lack efficient methods to monitor the remaining amount of liquid raw materials, especially when the liquid level is between detection positions or below the lowest detection level, leading to potential inaccuracies and failures in substrate processing.

Innovation Solution

A method is introduced that calculates the remaining amount of liquid raw material by combining the usage and replenishment amounts, estimates a detection result from a virtual sensor based on this calculation, and monitors the liquid level using both actual and virtual sensors to ensure accurate tracking and timely replenishment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a liquid level detector is used to detect liquid level position in a stepwise manner, then the device can monitor liquid raw material levels, but it cannot accurately detect when the liquid level is between detection positions or below the lowest detection level

Engineering Contradiction:
Improveliquid level detection accuracyVSAvoiddetection system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent creates a virtual sensor that copies the detection function of the physical liquid level detector. The virtual sensor calculates liquid level position based on remaining amount data from the storage tank, providing continuous detection coverage without requiring additional physical sensors at every possible detection position. This resolves the contradiction by adding computational capability rather than physical detection infrastructure.

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The patent introduces an intermediary calculation system that bridges the gap between the physical liquid level detector and the required continuous monitoring. The remaining amount data serves as an intermediary that enables precise calculation of liquid level position even when the physical detector cannot directly measure the level, thus improving measurement precision without proportionally increasing device complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If only physical liquid level detectors are used, then the system structure remains simple, but the system is vulnerable to sensor failures and cannot provide continuous accurate monitoring

Engineering Contradiction:
Improvemonitoring system reliabilityVSAvoidsensor system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent implements a feedback mechanism where the virtual sensor continuously calculates and provides liquid level information based on remaining amount data. This feedback loop ensures that even if the physical detector fails, the system maintains reliable monitoring through the virtual sensor's continuous calculations, thereby improving reliability without requiring a completely redundant physical sensor system.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent changes the parameter from direct physical detection to calculated parameter derivation. Instead of relying solely on physical sensor readings, the system uses remaining amount data to calculate liquid level position, transforming the monitoring approach from binary sensor states to continuous calculated values. This parameter transformation enhances reliability by providing continuous monitoring capability independent of physical sensor limitations.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If the liquid level is monitored only at fixed detection positions, then the detection system is simple, but it cannot detect liquid shortages or provide timely replenishment warnings

Engineering Contradiction:
Improvesubstrate processing continuityVSAvoidliquid level monitoring precision
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent applies preliminary action by having the virtual sensor continuously calculate and monitor liquid level positions before actual substrate processing interruptions occur. The system proactively identifies when liquid levels fall between detection positions or below the lowest level, enabling timely replenishment warnings that prevent processing interruptions. This preliminary monitoring action maintains productivity while requiring only computational resources rather than additional physical sensors.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS20250075322A1Method of monitoring liquid raw material and gas supply device
Publication Date: 2025.03.06 TOKYO ELECTRON LTD
  • US20250075322A1 patent drawing
  • US20250075322A1 patent drawing
  • US20250075322A1 patent drawing

AI summary

A method of monitoring a liquid raw material in a gas supply device, including a raw material storage tank that stores the liquid raw material, a liquid level detector that detects a liquid level of the liquid raw material, a gas inlet provided in the raw material storage tank, a gas outlet provided in the raw material storage tank, and a raw material inlet provided in the raw material storage tank, includes calculating a remaining amount of the liquid raw material based on a usage amount of the raw material and a replenishment amount of the raw material, estimating a detection result of a virtual sensor from the calculated remaining amount of the liquid raw material, and monitoring the liquid raw material based on a detection result of the liquid level detector and the estimated detection result of the virtual sensor.