Semiconductor Process Simulation With Virtual Sensors for Real-Time Monitoring
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Solution Overview
Problem
Current process simulation systems in semiconductor manufacturing lack real-time monitoring and predictive capabilities, leading to inefficiencies in process optimization, failure detection, and maintenance scheduling.
Innovation Solution
An information processing system that utilizes a simulation model to calculate virtual sensor data and process results, integrating physical sensor data from existing and additional sensors, and visualizes the process state in real-time, enabling autonomous control and predictive maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If process simulation is performed using physical models, then manufacturing precision is improved, but loss of time occurs due to post-process measurement requirements
Solution Approach 1:
The system performs simulation calculations in advance during process execution to predict process states before actual measurement is needed. The simulation execution unit calculates virtual sensor data and process results in real-time during the process, allowing immediate detection and response without waiting for post-process measurements.
Solution Approach 2:
The system continuously compares physical sensor data with virtual sensor data from simulation in a closed-loop feedback mechanism. The display controller visualizes both datasets together, enabling real-time verification and adjustment of process parameters based on the comparison between actual and simulated process states.
2Productivity
If real-time visualization of process state is implemented, then productivity is improved, but device complexity increases
Solution Approach 1:
The simulation execution unit serves multiple functions simultaneously: it calculates virtual sensor data for comparison with physical sensors, predicts process results for quality assurance, and provides visualization data for monitoring. This multi-functionality reduces the need for separate systems for each task.
Solution Approach 2:
The display controller acts as an intermediary that integrates and visualizes multiple data streams (physical sensor data, virtual sensor data, process results) in a unified interface. This mediator component simplifies the complexity by providing a single point of access for monitoring and control rather than requiring separate displays for each data type.
3Measurement precision
If virtual sensor data is calculated through simulation, then measurement precision is improved, but use of energy increases due to continuous simulation execution
Solution Approach 1:
The system calculates virtual sensor data for critical process parameters through simulation while potentially using simpler measurement methods for less critical parameters. The display controller selectively visualizes and compares data based on importance, performing full simulation calculations only where high precision is necessary for process control and quality.
Data Source
AI summary
An information processing system includes: a physical sensor data acquisition unit configured to acquire physical sensor data measured by a semiconductor manufacturing apparatus that executes a process according to a process parameter; a simulation execution unit configured to execute a simulation by a simulation model of the semiconductor manufacturing apparatus according to the process parameter and calculate virtual sensor data and virtual process result data; and a display controller that visualizes a process state of the semiconductor manufacturing apparatus and displays the process state on a display unit during the execution of the process using the physical sensor data, the virtual sensor data, and the virtual process result data.