Virtual System for Protected Semiconductor Yield Data
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Solution Overview
Problem
The semiconductor manufacturing process faces challenges due to the disaggregation of the semiconductor value chain, leading to friction and blockages in the flow of data required for monitoring, diagnosing, and optimizing complex process steps, exacerbated by the barriers of process, metrology, and inspection physics as per Moore's law advancements.
Innovation Solution
A system comprising a virtual system coupled with an actual system to perform functions with protected data sources from different entities, utilizing a combination of physical, electrical, and algorithmic techniques for data security, enabling cooperation among adversaries by receiving output from the actual system for a physical specimen without physically interacting with it, and performing virtual processes using protected data sources from multiple entities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If data from multiple entities is shared for semiconductor process monitoring and optimization, then process control and diagnosis effectiveness is improved, but data security and trust barriers worsen
Solution Approach 1:
The patent introduces a virtual system as an intermediary between multiple actual systems from different entities. This virtual system receives data from various sources, processes it securely, and generates outputs without requiring direct data sharing between the actual systems. The virtual system acts as a trusted mediator that enables collaboration while maintaining data security boundaries, thus resolving the contradiction between process control effectiveness and data security concerns.
Solution Approach 2:
The patent creates a virtual copy of the semiconductor manufacturing process that replicates the essential functions and data flows without requiring access to the actual physical systems. This virtual representation allows for process monitoring, diagnosis, and optimization while keeping the original data sources secure and isolated. The virtual system processes copied data to achieve the same control objectives without compromising data security.
2Adaptability or versatility
If a virtual system processes data from multiple protected sources, then cooperation among different entities is enabled, but system complexity increases
Solution Approach 1:
The virtual system is designed with multi-functionality to handle various data sources, processing requirements, and output formats from different entities within a single unified platform. This universal approach allows the system to accommodate multiple protected data sources without requiring separate systems for each entity, thereby enabling cooperation while managing complexity through consolidation rather than proliferation of separate systems.
3Object-affected harmful factors
If physical specimens are isolated for security, then data protection is improved, but process monitoring capability worsens
Solution Approach 1:
The patent creates virtual copies of physical specimens and their associated data, allowing the virtual system to process and analyze information without requiring physical access to the actual specimens. This copying mechanism ensures that sensitive physical specimens remain isolated and protected while still enabling comprehensive process monitoring through their virtual representations. The virtual copies contain sufficient information for monitoring purposes without compromising the security of the physical originals.
Data Source
AI summary
Methods and systems for performing functions with protected data sources from different entities are provided. One system includes a virtual system coupled to an actual system to thereby receive output generated by the actual system for a physical version of the specimen while the specimen is disposed within the actual system. The virtual system includes at least a computer system and a storage medium. The virtual system is not capable of having the physical version of the specimen disposed therein. The virtual system is configured for performing one or more functions for the specimen with two or more protected data sources from two or more different entities, respectively. The virtual system is also configured for performing a virtual version of a process capable of being performed by the actual system for the physical version of the specimen.