Virtual Time Sequencing for Deadlock-Free Substrate Scheduling
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Solution Overview
Problem
Conventional substrate processing systems face inefficiencies due to random routing and timing of substrates, leading to deadlocks, decreased throughput, and non-uniformity, requiring time-consuming and resource-intensive simulations to identify and resolve issues.
Innovation Solution
Implementing a virtual time axis to simulate operations and generate schedules, allowing for quicker identification and correction of deadlocks, and enabling more efficient testing of different operation orders without the need for real-time simulations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If real-time simulations are used to identify and resolve deadlocks and timing issues, then system reliability is improved, but processing time and resource consumption increase significantly
Solution Approach 1:
The patent creates a virtual model (copy) of the substrate processing system that simulates operations without requiring actual physical substrates or real-time execution. This virtual model allows complete simulation of processing sequences, deadlock detection, and timing analysis to be performed in minutes rather than hours or days, while maintaining full system reliability through comprehensive virtual testing
Solution Approach 2:
The patent replaces the mechanical/physical simulation system with a computational/virtual simulation system. Instead of using real substrates, physical equipment, and real-time processing to test and validate operation sequences, the system uses software-based virtual modeling that substitutes physical mechanisms with digital representations, enabling rapid iteration and testing without material consumption or equipment wear
2Adaptability or versatility
If conventional random routing and timing methods are used for substrate processing, then operational flexibility is maintained, but system productivity decreases due to deadlocks and non-uniformity
Solution Approach 1:
The patent performs preliminary simulation and validation of complete processing sequences before actual substrate processing begins. By pre-testing operation orders, routing paths, and timing parameters in the virtual model, the system identifies and resolves potential deadlocks and timing conflicts in advance, ensuring that when real processing occurs, it follows pre-validated high-productivity sequences without interruptions
Solution Approach 2:
The patent implements dynamic scheduling that adjusts operation timing and routing based on simulated system state and identified bottlenecks. The virtual model enables real-time optimization of processing sequences, allowing the system to adaptively reorder operations, reroute substrates, and adjust timing parameters to maintain high throughput while avoiding deadlocks, thereby combining flexibility with productivity
3Manufacturing precision
If multiple operation orders are tested using real substrates and physical equipment, then processing accuracy is validated, but equipment damage and resource consumption increase
Solution Approach 1:
The patent uses a detailed virtual copy of the processing system that includes all equipment parameters, operational constraints, and process conditions. This virtual model allows unlimited testing of different operation orders, routing strategies, and timing scenarios without exposing physical equipment to test conditions, thereby validating processing accuracy through virtual experimentation while completely preventing equipment damage during the testing phase
Solution Approach 2:
The patent replaces expensive, durable physical substrates and equipment usage with inexpensive virtual representations. The virtual model consumes computational resources rather than physical materials, allowing extensive testing and validation that would otherwise require consuming real substrates and subjecting equipment to repeated test cycles, thereby eliminating equipment damage while maintaining validation accuracy
Data Source
AI summary
A method includes generating a queue of a plurality of operations in a sequence recipe, the plurality of operations being associated with substrate processing. The method further includes sorting the plurality of operations in the queue based on a plurality of completion times corresponding to the plurality of operations. The method further includes, for each operation of the plurality of operations in the queue, obtaining a next operation in the queue and setting a virtual time axis to time leap to a corresponding completion time of the next operation until each operation of the plurality of operations in the queue are completed to generate a schedule for the sequence recipe.