Viscoelastic Vibration Damper for Charged Particle Beam Columns

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Solution Overview

Problem

Existing vibration suppression techniques for charged particle beam apparatuses with multiple columns are complex, lead to differences in vibration characteristics between columns, and fail to effectively dampen vibrations in tilted modes, resulting in image jitter and quality deterioration.

Innovation Solution

A charged particle beam apparatus with a connection member comprising plate-shaped members and a viscoelastic sheet interposed between them, connecting multiple columns to simplify vibration suppression and synchronize vibrations, converting shearing deformation into heat energy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If individual vibration control structures are provided for each column, then vibration suppression of each column is improved, but device complexity increases

Engineering Contradiction:

Improvevibration suppressionVSAvoidnumber of vibration control structures

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges multiple individual vibration control structures into a single integrated vibration control structure that simultaneously controls vibrations of multiple columns. This shared structure reduces the total number of vibration control components while maintaining effective vibration suppression across all columns, directly resolving the contradiction between reliability and device complexity.

Inventive Principle:

Principle #5Merging (Combining)

2Reliability

If individual vibration control structures are provided for each column, then each column can be controlled independently, but manufacturing precision requirements increase due to attachment adjustment variations

Engineering Contradiction:

Improvevibration controlVSAvoidattachment adjustment

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

By combining multiple vibration control functions into a single integrated structure with standardized attachment mechanisms, the patent reduces the cumulative effect of attachment adjustment variations. The unified design ensures consistent vibration control performance across multiple columns without requiring extremely high manufacturing precision for each individual attachment point.

Inventive Principle:

Principle #5Merging (Combining)

3Stability of the object's composition

If rigid body connection is used between lens barrels, then structural stability is improved, but vibration energy remains for long period and cannot be dampened

Engineering Contradiction:

Improvestructural stabilityVSAvoidvibration energy dissipation

Core Design Contradiction:

Stability of the object's compositionVSLoss of energy

Solution Approach 1:

The patent employs a composite vibration control structure that combines rigid components (for structural stability) with viscoelastic damping materials (for vibration energy dissipation). This composite design allows the structure to maintain stability while effectively converting vibration energy into heat, resolving the contradiction between structural stability and vibration energy dissipation.

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The patent converts harmful vibration energy into beneficial heat energy through the use of viscoelastic damping materials within the vibration control structure. This energy conversion mechanism allows the system to maintain structural stability while actively dissipating vibration energy, transforming the problematic vibration into a harmless form.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

4Ease of operation

If vibration control structure is detached for maintenance, then accessibility is improved, but vibration characteristics change after reattachment

Engineering Contradiction:

Improvemaintenance accessibilityVSAvoidvibration characteristic consistency

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

By integrating multiple vibration control functions into a single unified structure, the patent reduces the number of attachment and detachment operations required for maintenance. This consolidation minimizes the opportunities for reattachment errors, thereby maintaining more consistent vibration characteristics after maintenance compared to multiple separate vibration control structures.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively suppresses vibrations across multiple columns with a simple structure, improving image quality and defect detection accuracy by synchronizing vibrations and reducing image misalignment and jitter.

Implementation Method 1

a viscoelastic sheet which is interposed between the plurality of plate-shaped members

Methodology Applied

Scientific EffectViscoelasticity: Viscoelasticity

Implementation Method 2

converting shearing deformation into heat energy

Methodology Applied

Scientific EffectVibration damping: Damping

Implementation Method 3

converting shearing deformation into heat energy

Methodology Applied

Scientific EffectShear deformation: Shear Stress

Data Source

PatentUS10056226B2Charged particle beam apparatus and vibration damper for charged particle beam apparatus

Publication Date: 2018.08.21 HITACHI HIGH TECH CORP

AI summary

There is proposed a column supporting structure that includes a viscoelastic sheet, a supporting plate which holds the viscoelastic sheet, and a fixation portion which connects the supporting plate to each lens barrel. The viscoelastic sheet is disposed to extend in a plane perpendicular to one lens barrel or the other lens barrel.