Compressed Viscoelastic Damper Bonding for Reliable Force Transfer
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Solution Overview
Problem
Conventional damper devices in lithographic apparatuses require complex manufacturing processes to ensure reliable force transfer between device parts and damping material.
Innovation Solution
A method for manufacturing a damper device involving providing damping material in a compressed state between two parts and heating the device to a predetermined temperature to adhere the damping material to the parts, ensuring effective force transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional manufacturing processes are used for damper devices, then reliable force transfer between device parts and damping material is achieved, but the manufacturing process becomes complex
Solution Approach 1:
The patent applies parameter changes by heating the damping material to its glass transition temperature to alter its physical state from rigid to compliant, enabling it to conform to the geometry of the device parts. This temperature parameter change allows the damping material to be molded directly onto the parts, ensuring reliable force transfer while simplifying the manufacturing process compared to conventional methods
2Volume of moving object
If damping material is provided in a compressed state between device parts, then space utilization is improved, but the manufacturing process requires additional steps
Solution Approach 1:
The patent applies preliminary action by pre-compressing the damping material before applying heat, so that when the material reaches its glass transition temperature, it is already in the correct compressed position and geometry. This preliminary compression step eliminates the need for additional molding or shaping steps during assembly, actually reducing the total number of manufacturing steps while achieving optimal space utilization
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Simplifies the manufacturing process while ensuring reliable force transfer and energy dissipation through the deformation of viscoelastic damping material, supporting optical elements in lithographic apparatuses.
Implementation Method 1
energy dissipation through the deformation of viscoelastic damping material
Implementation Method 2
heating the device to a predetermined temperature in order to adhere the damping material to the first part and the second part
Data Source
AI summary
The invention relates a method for manufacturing a damper device including a first part and a second part, said method comprising the following steps: a) providing a damping material in a space in between the first part and the second part, such that the damping material is in a compressed state in the space; and b) heating the device to a predetermined temperature in order to adhere the damping material to the first part and the second part.