Viscoelastic Septum for MEMS Fluidic Interconnect
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Solution Overview
Problem
Current micro electro mechanical systems (MEMS) devices face challenges in macro-to-micro fluidic connections and packaging due to the lack of readily available fluidic connection products, leading to issues like increased dead volume, complex assembly, misalignment, and permanence of connections, which hinder their commercial utilization and mass fabrication.
Innovation Solution
A micro electro mechanical systems (MEMS) device with a viscoelastic septum element that forms a fluid-tight seal, allowing for in-plane interconnects without openings between the septum entry and exit surfaces, enabling efficient fluid communication and reusability through the use of a needle or sensor for fluid injection and removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If out-of-plane connection format is used to attach fitting or tubing to MEMS device, then fluidic connection is achieved, but dead volume and space increase dramatically
Solution Approach 1:
The patent transitions from out-of-plane connections to in-plane connections by positioning the septum element within the plane of the MEMS device substrate. The septum entry surface and exit surface are both accessible from the same plane, allowing connections to be made horizontally rather than vertically, thereby reducing the vertical space requirement and eliminating the need for elevated support structures.
Solution Approach 2:
The septum element is nested within a septum cavity formed in the device wall layer of the MEMS device. This integration allows the connection interface to be embedded within the device structure itself rather than attached externally, reducing the overall footprint and dead volume while maintaining fluidic connectivity.
2Reliability
If manual alignment and gluing of tubing to ports is used, then fluidic connection is achieved, but assembly complexity and time increase
Solution Approach 1:
The viscoelastic septum element provides self-sealing functionality where the material automatically seals around the elongate structure (needle or sensor) when it is inserted and removed. This eliminates the need for manual alignment, adhesives, or complex assembly procedures, as the septum autonomously maintains the fluid-tight seal throughout the insertion and removal cycles.
Solution Approach 2:
The patent utilizes the viscoelastic properties of the septum material, which changes its physical parameters (viscosity and elasticity) in response to mechanical deformation. When the elongate structure is inserted, the material deforms to accommodate it; when removed, the material returns to its original state, automatically sealing the opening. This parameter change enables reusable connections without complex assembly.
3Reliability
If traditional connection methods are used, then fluidic access is achieved, but misalignment and large footprint occur
Solution Approach 1:
The septum element serves multiple functions: it provides a fluid-tight seal, accommodates the insertion and removal of elongate structures, maintains alignment through its integrated cavity positioning, and enables reusable access. The standardized septum cavity design allows consistent positioning that facilitates precise alignment during manufacturing while maintaining flexibility for various connection applications.
4Reliability
If permanent connections are made to MEMS devices, then fluidic connection is achieved, but reusability is lost
Solution Approach 1:
The septum element transitions from a static sealed state to a dynamic state during elongate structure insertion and removal. The viscoelastic material dynamically deforms to accommodate the needle or sensor, then dynamically returns to its original configuration to seal the opening. This dynamic behavior enables the connection to be temporarily opened and closed multiple times, providing reusability while maintaining connection reliability throughout the process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a reliable, reusable, and space-efficient fluid-tight interconnect for MEMS devices, reducing dead volume and assembly complexity, facilitating batch processing and commercialization by maintaining a seal after needle removal and allowing in-plane access without interfering with microscope objectives.
Implementation Method 1
The septum element is formed of a viscoelastic material. The septum element defines a fluid-tight seal with the device wall layer at the septum cavity with respect to fluid leakage between the channel and the MEMS device adjacent the septum entry surface.
Data Source
AI summary
Provided is a micro electro mechanical systems (MEMS) device for use with an elongate structure. The MEMS device includes a generally planar substrate, a device wall layer formed upon the substrate, a septum cavity formed in the device wall layer, a channel formed in the device wall layer in fluid communication with the septum cavity, and a septum element disposed in the septum cavity. The septum element is formed of a viscoelastic material. The septum element defines a septum entry surface and a septum exit surface with the septum exit surface being exposed to the channel and disposed between the septum entry surface and the channel. The septum element is without any openings formed through the septum element extending between the septum entry and exit surfaces. Methods of manufacturing and interacting with the MEMS device are also provided.