Vision-Based Substrate Alignment System
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Solution Overview
Problem
Current substrate handling systems in integrated circuit fabrication are expensive, prone to failure, and occupy valuable space due to the need for costly pre-aligner systems to accurately position substrates within processing equipment.
Innovation Solution
A substrate loading system utilizing a vision system to provide position signals to a robot arm, allowing it to transport and position substrates without the need for expensive pre-alignment systems, by determining the substrate's position and sending transport signals to the robot arm for precise placement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a pre-aligner system is used to position substrates, then substrate positioning accuracy is improved, but system cost increases significantly
Solution Approach 1:
The patent replaces the mechanical pre-aligner system with a vision-based detection system combined with robot arm control. The vision system captures substrate images, determines position and orientation through image processing, and sends correction signals to the robot arm, eliminating the need for expensive mechanical alignment equipment while achieving comparable positioning accuracy.
Solution Approach 2:
The patent introduces a vision system as an intermediary between the substrate handling mechanism and the positioning control system. This intermediary captures optical information about substrate position and orientation, processes it through image analysis, and translates it into corrective positioning signals, thereby replacing direct mechanical measurement and alignment mechanisms.
2Measurement precision
If a pre-aligner system is installed in each tool, then substrate alignment is improved, but space requirements increase
Solution Approach 1:
The patent makes the robot arm multi-functional by enabling it to perform both substrate transport and substrate alignment functions. The same robot arm that moves substrates between tools is also used for precise positioning within tools, eliminating the need for separate pre-aligner equipment and reducing space requirements.
Solution Approach 2:
The patent merges the alignment function with the existing robot arm system. Instead of adding separate alignment equipment, the vision system is integrated with the robot arm's control system, combining transportation and alignment operations into a single coordinated system that reduces overall space consumption.
3Measurement precision
If a pre-aligner system is used, then substrate position detection is improved, but system reliability decreases due to more components
Solution Approach 1:
The patent extracts the alignment function from the mechanical pre-aligner system and implements it through software-based image processing and control algorithms. This reduces the number of mechanical components that can fail while maintaining positioning precision through computational methods.
Solution Approach 2:
The patent replaces mechanical measurement components of the pre-aligner system with a vision-based detection system. The vision system uses cameras and image processing algorithms to detect substrate position and orientation, reducing mechanical complexity and potential failure points while maintaining or improving measurement precision.
Data Source
AI summary
A substrate loading system, having a vision system adapted to view a substrate and provide position signals indicative of substrate position. A controller receives the position signals from the vision system, determines the substrate position, and sends transport signals to a robot arm. The robot arm engages the substrate in a beginning location and a beginning position and transports the substrate to a desired location and a desired position, based at least in part on the transport signals received from the controller.